"109-112" . "\u017Dilinsk\u00E1 univerzita v \u017Diline" . . . "[581D4373F3B3]" . "3"^^ . "This paper is devoted to the investigation of structural and optical properties of a-Si:H thin films different in thickness, ordered in single and multi-layered structures deposited by PE CVD technique on corning glass 1733 and Si/SiO2 substrates with dilution 30."@en . . "Strukturn\u00ED a optick\u00E9 vlastnosti tenk\u00FDch vrstev a-Si:H v multivrstv\u00FDch struktur\u00E1ch"@cs . "Structural and optical properties of a-Si:H thin films in multilayered structures" . "Tento p\u0159\u00EDsp\u011Bvek je v\u011Bnovan\u00FD vy\u0161et\u0159ov\u00E1n\u00ED strukturn\u00EDch a optick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev a-Si:H s r\u016Fznou tlou\u0161\u0165kou v jednovrstv\u00FDch a multivrstv\u00FDch struktur\u00E1ch deponovan\u00FDch metodou PECVD na sklen\u011Bn\u00E9 a Si/SiO2 substr\u00E1ty se z\u0159ed\u011Bn\u00EDm 30."@cs . "Proceedings of the 13th International Conference on Applied Physics of Condensed Matter" . . . "Netrvalov\u00E1, Marie" . "2"^^ . "van Elzakker, Gijs" . "Structural and optical properties of a-Si:H thin films in multilayered structures"@en . "Structural and optical properties of a-Si:H thin films in multilayered structures"@en . "This paper is devoted to the investigation of structural and optical properties of a-Si:H thin films different in thickness, ordered in single and multi-layered structures deposited by PE CVD technique on corning glass 1733 and Si/SiO2 substrates with dilution 30." . . . . . . "4"^^ . . . . "Vavru\u0148kov\u00E1, Veronika" . . . "Structural and optical properties of a-Si:H thin films in multilayered structures" . "multi-layered structures; PECVD; dilution; a-Si:H"@en . "2007-01-01+01:00"^^ . . "Strukturn\u00ED a optick\u00E9 vlastnosti tenk\u00FDch vrstev a-Si:H v multivrstv\u00FDch struktur\u00E1ch"@cs . . "P(1M06031)" . "978-80-8070-709-5" . "452839" . "Bystr\u00E1, Slovak Republic" . "RIV/49777513:23640/07:00000044" . "RIV/49777513:23640/07:00000044!RIV08-MSM-23640___" . "23640" . "\u017Dilina" . .