. "\u0160utta, Pavol" . "Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions"@en . . "Bratislava" . . . "978-80-969435-3-1" . . . . "Thin films of hydrogenated amorphous silicon were deposited by plasma - enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen (dilution D range 5 – 40). Thickness of the samples was 300 nm. The applied techniques for structural and optical analysis were: XRD diffraction, UV- VIS spectrophotometry and FTIR. Micro-crystallite regions appeared only at higher hydrogen dilutions (D = 33, 40). Structure includes an amorphous phase with the short-range order are called protocrystalline silicon. Structural properties were obtained from the XRD analysis. The results of optical spectrometry measurement of the films are also presented." . "4"^^ . "2007-01-01+01:00"^^ . "Strukturn\u00ED a optick\u00E9 vlastnosti PECVD a-Si:H ovlivn\u011Bn\u00E9 r\u016Fzn\u00FDm vod\u00EDkov\u00FDm z\u0159ed\u011Bn\u00EDm"@cs . . "Slovensk\u00E1 v\u00E1kuov\u00E1 spolo\u010Dnos\u0165" . . . "Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions"@en . . "Vavru\u0148kov\u00E1, Veronika" . "P(1M06031)" . "V\u00E1kuov\u00E9 technol\u00F3gie - nov\u00E9 trendy vo v\u00FDskume a aplik\u00E1ci\u00E1ch" . "a-Si:H; dilution; PECVD; structural properties; optical properties"@en . "104-107" . . "RIV/49777513:23640/07:00000030!RIV08-MSM-23640___" . . "3"^^ . "23640" . . . "Thin films of hydrogenated amorphous silicon were deposited by plasma - enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen (dilution D range 5 – 40). Thickness of the samples was 300 nm. The applied techniques for structural and optical analysis were: XRD diffraction, UV- VIS spectrophotometry and FTIR. Micro-crystallite regions appeared only at higher hydrogen dilutions (D = 33, 40). Structure includes an amorphous phase with the short-range order are called protocrystalline silicon. Structural properties were obtained from the XRD analysis. The results of optical spectrometry measurement of the films are also presented."@en . "Tenk\u00E9 vrstvy hydrogenizovan\u00E9ho amorfn\u00EDho k\u0159em\u00EDku byly p\u0159ipraveny PECVD technologi\u00ED ze silanu z\u0159ed\u011Bn\u00E9ho vod\u00EDkem (z\u0159ed\u011Bn\u00ED D = 5 - 40). Tlou\u0161\u0165ka vrstev byla 300 nm. Pou\u017Eit\u00E9 techniky pro vy\u0161et\u0159ov\u00E1n\u00ED strukturn\u00EDch a optick\u00FDch vlastnost\u00ED jsou: rtg difrakce, UV - VIS spektrofotometrie a FTIR. Mikrokrystalick\u00E9 oblasti se objevily pouze p\u0159i vy\u0161\u0161\u00EDm vod\u00EDkov\u00E9m z\u0159ed\u011Bn\u00ED (D= 33, 40). Struktura obsahuj\u00EDc\u00ED amorfn\u00ED f\u00E1zi s uspo\u0159\u00E1d\u00E1n\u00EDm na kr\u00E1tkou vzd\u00E1lenost je naz\u00FDv\u00E1na tzv. protokrystalick\u00FDm k\u0159em\u00EDkem. Strukturn\u00ED vlastnosti byly ur\u010Deny z rtg anal\u00FDzy. D\u00E1le jsou zde prezentov\u00E1ny v\u00FDsledky z optick\u00E9 spektrometrie."@cs . "\u0160utta, Pavol" . "Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions" . "[A72B96C454E9]" . "M\u00FCllerov\u00E1, Jarmila" . "Strukturn\u00ED a optick\u00E9 vlastnosti PECVD a-Si:H ovlivn\u011Bn\u00E9 r\u016Fzn\u00FDm vod\u00EDkov\u00FDm z\u0159ed\u011Bn\u00EDm"@cs . "RIV/49777513:23640/07:00000030" . "2"^^ . . . . "452840" . "Structural and optical properties of PECVD a-Si:H influenced by different hydrogen dilutions" . "\u0160trbsk\u00E9 Pleso" .