"\u0160utta, Pavol" . "Verlag ISLE" . "[EA76EA302935]" . "509895" . . "Zinc oxide (ZnO) is a unique material that exhibits semiconducting, piezoelectric, pyroelectric and optoelectronic multiple properties. Zinc oxide is a transparent semiconductor with a direct bandgap of 3,37 eV and large excitation binding energy (60 meV). ZnO thin film deposition by sputtering is determined by complex processes proceeding: a) at the target bombarded by energetic ions, b) in the low-temperature plasma, c) on the surface of substrate and growing film." . "Breternitz, V." . . "Zinc oxide (ZnO) is a unique material that exhibits semiconducting, piezoelectric, pyroelectric and optoelectronic multiple properties. Zinc oxide is a transparent semiconductor with a direct bandgap of 3,37 eV and large excitation binding energy (60 meV). ZnO thin film deposition by sputtering is determined by complex processes proceeding: a) at the target bombarded by energetic ions, b) in the low-temperature plasma, c) on the surface of substrate and growing film."@en . "Kov\u00E1\u010D, J." . "Nigrovi\u010Dov\u00E1, Martina" . . "\u0160utta, Pavol" . "Flickyngerov\u00E1, So\u0148a" . "Knedl\u00EDk, Ch." . "Zinc Oxide - Unique Material for Micro- /Nanotechnology"@en . . . "P(1M06031)" . "Proceedings and our portrait" . . "Oxid zinku - unik\u00E1tn\u00ED materi\u00E1l pro mikro- /nanotechnologii"@cs . "Zinc Oxide - Unique Material for Micro- /Nanotechnology" . "Oxid zine\u010Dnat\u00FD (ZnO) je unik\u00E1tn\u00ED materi\u00E1l s polovodiv\u00FDmi, piezoelektrick\u00FDmi, pyroelektrick\u00FDmi a optoelektrick\u00FDmi vlastnostmi. ZnO je transparentn\u00ED polovodi\u010D se \u0161\u00ED\u0159kou zak\u00E1zan\u00E9ho p\u00E1su 3,37 eV a velkou vazebnou energi\u00ED (60 meV). Tenk\u00E9 vrstvy ZnO deponovan\u00E9 napra\u0161ov\u00E1n\u00EDm jsou ovlivn\u011Bny p\u0159i v\u00FDrob\u011B: a) bombardov\u00E1n\u00ED ter\u010De energetick\u00FDmi iony, b) n\u00EDzkoteplotn\u00ED plazmou, c) povrchem substr\u00E1tu a rostouc\u00EDm filmem."@cs . "23640" . "Ilmenau" . "Ilmenau" . "11"^^ . "Zinc Oxide - Unique Material for Micro- /Nanotechnology" . . "\u0160atka, P." . "1"^^ . "Tvaro\u017Eek, Vladim\u00EDr" . "RIV/49777513:23640/06:00000112" . "Zinc oxide"@en . . "Novotn\u00FD, Ivan" . . "Oxid zinku - unik\u00E1tn\u00ED materi\u00E1l pro mikro- /nanotechnologii"@cs . "Zinc Oxide - Unique Material for Micro- /Nanotechnology"@en . "Spiess, L." . . . "3-938843-16-0" . "2006-01-01+01:00"^^ . "10"^^ . "RIV/49777513:23640/06:00000112!RIV07-MSM-23640___" . "1-11" . . .