"We report on the results of the investigation of surface morphology, structure and optical properties of plasma deposited thin films of hydrogenated amorphous silicon determined by atomic force microscopy, X-ray diffraction and UV-Vis and IR spectroscopy. The influence of the both hydrogen dilution of silane plasma in the plasma deposition and the film thickness on the film properties was investigated. The structure, the refractive index and the optical band gap of the dilution series and the thickness series were analyzed." . . . "544915" . "Acta Physica Slovaca" . . . . . "1"^^ . . "Structural and optical studies of a-Si:H thin films: From amorphous to nanocrystalline silicon"@en . "SK - Slovensk\u00E1 republika" . "Structural and optical studies of a-Si:H thin films: From amorphous to nanocrystalline silicon"@en . "4"^^ . . "Structural and optical studies of a-Si:H thin films: From amorphous to nanocrystalline silicon" . . "Mikula, M." . "RIV/49777513:23640/05:00503392!RIV11-MSM-23640___" . "9"^^ . . "23640" . "P(LN00B084)" . "Jure\u010Dka, S." . "3" . "000229323000011" . . . "M\u00FCllerov\u00E1, Jarmila" . "RIV/49777513:23640/05:00503392" . . "[8A621969E297]" . "\u0160utta, Pavol" . "We report on the results of the investigation of surface morphology, structure and optical properties of plasma deposited thin films of hydrogenated amorphous silicon determined by atomic force microscopy, X-ray diffraction and UV-Vis and IR spectroscopy. The influence of the both hydrogen dilution of silane plasma in the plasma deposition and the film thickness on the film properties was investigated. The structure, the refractive index and the optical band gap of the dilution series and the thickness series were analyzed."@en . "amorphous silicon; nanocrystalline silicon; thin films; properties"@en . . "Structural and optical studies of a-Si:H thin films: From amorphous to nanocrystalline silicon" . "0323-0465" . . . "55" .