"205788" . "10.1002/ppap.201000131" . . . . . . . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "\u0160\u00EDcha, Jan" . "4"^^ . "Ion Flux Characteristics in Pulsed Dual Magnetron Discharges Used for Deposition of Photoactive TiO2 Films"@en . . . . "RIV/49777513:23520/11:43898421" . . "Nov\u00E1k, Ond\u0159ej" . . "Ion Flux Characteristics in Pulsed Dual Magnetron Discharges Used for Deposition of Photoactive TiO2 Films"@en . . "Kudl\u00E1\u010Dek, Pavel" . . "[C10FD2C4A3CB]" . . . "1612-8850" . "000289024800002" . . . . "9"^^ . . "TiO2 films; pulsed dual magnetron sputtering; photocatalysis; mass spectroscopy; ion energy distribution function"@en . . . "3" . "Pulsed dc dual magnetron sputtering was used for preparation of photocatalytic crystalline TiO2 films. Both magnetrons operated in the asymmetric bipolar mode at the repetition frequency of 100 kHz. Time-averaged energy-resolved mass spectroscopy was performed at a substrate position located 100 mm from the targets. A suppression of high-energy ions in the flux onto the substrate resulted in a strong predominance of the highly photoactive crystalline anatase phase in the TiO2 films." . "Ion Flux Characteristics in Pulsed Dual Magnetron Discharges Used for Deposition of Photoactive TiO2 Films" . "23520" . "Vl\u010Dek, Jaroslav" . . "P(OC10045), Z(MSM4977751302)" . "8" . . "Pulsed dc dual magnetron sputtering was used for preparation of photocatalytic crystalline TiO2 films. Both magnetrons operated in the asymmetric bipolar mode at the repetition frequency of 100 kHz. Time-averaged energy-resolved mass spectroscopy was performed at a substrate position located 100 mm from the targets. A suppression of high-energy ions in the flux onto the substrate resulted in a strong predominance of the highly photoactive crystalline anatase phase in the TiO2 films."@en . "4"^^ . "RIV/49777513:23520/11:43898421!RIV12-MSM-23520___" . "Plasma Processes and Polymers" . "Ion Flux Characteristics in Pulsed Dual Magnetron Discharges Used for Deposition of Photoactive TiO2 Films" .