. . . "Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance" . "2"^^ . . "RIV/49777513:23520/07:00000335" . "Zeman, Petr" . "a-Si3N4/MeNx composites; structure; surface morphology; mechanical properties; oxidation resistance; DC reactive magnetron sputtering"@en . . . "Solid State Phenomena" . "Tvrd\u00E9 nanokompozitn\u00ED povlaky a-Si3N4/MeNx s vysokou teplotn\u00ED stabilitou a oxida\u010Dn\u00ED odolnost\u00ED"@cs . . "Tvrd\u00E9 nanokompozitn\u00ED povlaky a-Si3N4/MeNx s vysokou teplotn\u00ED stabilitou a oxida\u010Dn\u00ED odolnost\u00ED"@cs . "Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance"@en . "2"^^ . . . "423806" . "RIV/49777513:23520/07:00000335!RIV08-MSM-23520___" . "Studie se v\u011Bnuje nov\u00E9 skupin\u011B amorfn\u00EDch nanokompozitn\u00EDch povlak\u016F a-Si3N4/MeNx s vysok\u00FDm (>50 obj.%) obsahem f\u00E1ze Si3N4 (Me=Zr, Ta, Mo a W). Tyto nanokompozity vykazuj\u00ED vysokou (>1000\u00B0C) teplotn\u00ED stabilitu zabra\u0148uj\u00EDc\u00ED krystalizaci a vysokou (>1000\u00B0C) oxida\u010Dn\u00ED odolnost v p\u0159\u00EDpad\u011B, \u017Ee je kov Me zabudovan\u00FD do nanokompozitu vhodn\u011B zvolen\u00FD. Bylo zji\u0161t\u011Bno, \u017Ee vrstva Zr-Si-N deponovan\u00E1 na substr\u00E1t Si(100) nevykazuje \u017E\u00E1dn\u00FD n\u00E1r\u016Fst hmotnosti (Δm=0) b\u011Bhem termogravimetrick\u00E9ho m\u011B\u0159en\u00ED proveden\u00E9ho v tekouc\u00EDm vzduchu a\u017E do teploty 1300\u00B0C, tj. a\u017E do teplotn\u00EDho limitu substr\u00E1tu Si, co\u017E nen\u00ED teplotn\u00ED limit nanokompozitu."@cs . . . . "[DDB50629CA99]" . "Musil, Jind\u0159ich" . . "This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300\u00B0C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite." . . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . . "31" . "6"^^ . . . "This article reports on a new class of amorphous a-Si3N4/MeNx nanocomposite coatings with a high content of Si3N4 phase; here Me=Zr, Ta, Mo and W. These nanocomposites exhibit high thermal stability against crystallization and high oxidation resistance if the metal Me incorporated in the nanocomposite is correctly selected. It was found that the Zr-Si-N film deposited on Si substrate exhibits no increase of the mass in thermogravimetric measurements performed in flowing air up to 1300\u00B0C, i.e. up to the temperature that is the thermal limit for Si substrate but not for nanocomposite."@en . "Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance" . "1012-0394" . "Z(MSM4977751302)" . "0" . . "23520" . "Hard a-Si3N4/MeNx nanocomposite coatings with high thermal stability and high oxidation resistance"@en . .