"5"^^ . "Two sets of nanocrystalline TiO2 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering and measurements of contact angle of water drop on the film surface. Phase analysis and X-ray line broadening were studied by X-ray powder diffraction in parallel beam optics, the residual stresses were measured with the aid of the Eulerian cradle and surface roughness determined by X-ray reflectivity measurement. By both thickness dependence of XRD patterns and depth profiling measurements it was found that rutile growths on the substrate and it is transformed to anatase with increasing distance from the substrate." . "0044-2968" . "23520" . "RIV/49777513:23520/07:00000207!RIV08-MSM-23520___" . "[D199B7672AD8]" . . . "Zeitschrift f\u00FCr Kristallographie" . "241" . . . . "He\u0159man, David" . . . "P(GA106/06/0327), Z(MSM0021620834), Z(MSM4977751302)" . "Growth of magnetron sputtered TiO2 thin films studied by X-ray scattering"@en . "titanium oxide; thin film growth; X-ray diffraction; thin films"@en . . "Growth of magnetron sputtered TiO2 thin films studied by X-ray scattering" . "\u0160\u00EDcha, Jan" . "0" . . "RIV/49777513:23520/07:00000207" . . . . "XRD studie r\u016Fstu vrstev TiO2 p\u0159ipraven\u00FDch magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm"@cs . . . . "Ku\u017Eel, Radom\u00EDr" . "Nichtov\u00E1, L." . "3"^^ . "6"^^ . . . . . "Musil, Jind\u0159ich" . . "Two sets of nanocrystalline TiO2 thin films magnetron deposited on glass and silicon substrates have been studied by X-ray scattering and measurements of contact angle of water drop on the film surface. Phase analysis and X-ray line broadening were studied by X-ray powder diffraction in parallel beam optics, the residual stresses were measured with the aid of the Eulerian cradle and surface roughness determined by X-ray reflectivity measurement. By both thickness dependence of XRD patterns and depth profiling measurements it was found that rutile growths on the substrate and it is transformed to anatase with increasing distance from the substrate."@en . "Byly provedeny anal\u00FDzy vlivu tlous\u0165ky vrstev TiO2 na jejich f\u00E1zov\u00E9 slo\u017Een\u00ED a hydrofilicitn\u00ED chov\u00E1n\u00ED charakterizovan\u00E9 poklesem kontaktn\u00EDho \u00FAhlu mezi vodou a povrchem vrstev. S vyu\u017Eit\u00EDm XRD anal\u00FDzy bylo podrobn\u011B analyzov\u00E1no f\u00E1zov\u00E9 slo\u017Een\u00ED, zbytkov\u00FD stress a na z\u00E1klad\u011B reflexe XRD z\u00E1\u0159en\u00ED byla ur\u010Dena povrchov\u00E1 morfologie p\u0159ipraven\u00FDch vrstev. Bylo zji\u0161t\u011Bno, \u017Ee vysokoteplotn\u00ED krystalov\u00E1 f\u00E1ze TiO2 rutil je p\u0159\u00EDtomna na rozhran\u00ED vrstva substr\u00E1t a sm\u011Brem k povrchu vrstvy je transformov\u00E1na na krystalovou f\u00E1zi anat\u00E1zu."@cs . "Growth of magnetron sputtered TiO2 thin films studied by X-ray scattering" . "423697" . "XRD studie r\u016Fstu vrstev TiO2 p\u0159ipraven\u00FDch magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm"@cs . "DE - Spolkov\u00E1 republika N\u011Bmecko" . "Growth of magnetron sputtered TiO2 thin films studied by X-ray scattering"@en . .