"0" . "0" . . "Effect of Addition on Structure and Properties of Sputtered TiC Films"@en . . "[6CAA0B7AEA2F]" . "Al doping; magnetron sputtering; mechanical properties; oxidation resistance; structure; TiC-Al films"@en . "Plasma Processes and Polymers" . "1612-8850" . "Z(MSM4977751302)" . . "23520" . "RIV/49777513:23520/07:00000103!RIV08-MSM-23520___" . . . "The article reports on the effect of Al addition on the structure, macrostress, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target fixed with an Al fixing ring of various inner diameters. It was found that a continuous increase in Al content in the TiC-Al film results in gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, decrease in the compressive macrostress up to its conversion to the tensile one decrease in film microhardness, and increase in its oxidation resistance."@en . "418813" . "Effect of Addition on Structure and Properties of Sputtered TiC Films"@en . . "Effect of Addition on Structure and Properties of Sputtered TiC Films" . "Vliv p\u0159idan\u00E9ho hlin\u00EDku na strukturu a vlastnosti napra\u0161ovan\u00FDch TiC film\u016F"@cs . . . "Zeman, Petr" . "\u010Cl\u00E1nek popisuje vliv p\u0159idan\u00E9ho hlin\u00EDku na strukturu, makropnut\u00ED, mechanick\u00E9 vlastnosti a oxida\u010Dn\u00ED odolnost TiC-Al film\u016F. Tyto filmy byly napra\u0161ov\u00E1ny za pou\u017Eit\u00ED stejnosm\u011Brn\u00E9ho nevyv\u00E1\u017Een\u00E9ho magnetronu vybaven\u00E9ho TiC ter\u010Dem (o \u010Distot\u011B 99.95 %) upevn\u011Bn\u00E9ho Al krou\u017Ekem (o \u010Distot\u011B 99.99 %) s prom\u011Bnn\u00FDm vnit\u0159n\u00EDm pr\u016Fm\u011Brem. Bylo zji\u0161t\u011Bno, \u017Ee postupn\u00E9 zv\u00FD\u0161en\u00ED obsahu hlin\u00EDku v TiC-Al vrstv\u00E1ch vede k: (i) postupn\u00E9 zm\u011Bn\u011B struktury od krystalick\u00E9ho TiC p\u0159es XRD amorfn\u00ED TiC-Al ke krystalick\u00FDm TiAl2, (ii) sn\u00ED\u017Een\u00ED tlakov\u00E9ho pnut\u00ED a jeho p\u0159echodu do pnut\u00ED tahov\u00E9ho (iii) sn\u00ED\u017Een\u00ED mikrotvrdosti film\u016F (iv) zlep\u0161en\u00ED oxida\u010Dn\u00ED odolnosti."@cs . "3"^^ . . . . . "DE - Spolkov\u00E1 republika N\u011Bmecko" . . . . "Musil, Jind\u0159ich" . . . . "3"^^ . "Effect of Addition on Structure and Properties of Sputtered TiC Films" . "1"^^ . "Vliv p\u0159idan\u00E9ho hlin\u00EDku na strukturu a vlastnosti napra\u0161ovan\u00FDch TiC film\u016F"@cs . "Sold\u00E1n, Jan" . . "RIV/49777513:23520/07:00000103" . "The article reports on the effect of Al addition on the structure, macrostress, mechanical properties and oxidation resistance of TiC-Al thin films. These films were sputtered using dc unbalanced magnetron equipped with a TiC target fixed with an Al fixing ring of various inner diameters. It was found that a continuous increase in Al content in the TiC-Al film results in gradual change of the film structure from the crystalline TiC through X-ray amorphous TiC-Al to the crystalline Al2Ti, decrease in the compressive macrostress up to its conversion to the tensile one decrease in film microhardness, and increase in its oxidation resistance." . .