. . "2005-01-15+01:00"^^ . "We report on the results obtained by time-resolved Langmuir probe diagnostics in high-power pulsed dc magnetron sputtering discharges proposed for ionized high-rate sputtering of metallic films. Time evolutions of the electron energy distribution and loc"@en . "Time-resolved Langmuir probe diagnostics in high-power pulsed dc magnetron sputtering discharges" . . . "Univerzita Komensk\u00E9ho v Bratislave" . "2"^^ . "97-98" . "RIV/49777513:23520/05:00000251" . "4"^^ . "pulsed magnetron sputtering; high-power discharge; time-resolved Langmuir probe; copper"@en . . . . "[FDA6A8D55FD2]" . . "Bratislava" . . "4"^^ . . . . "Vl\u010Dek, Jaroslav" . "80-223-2018-8" . . "P(ME 673), Z(MSM 235200002)" . "Luk\u00E1\u0161, Jan" . "Time-resolved Langmuir probe diagnostics in high-power pulsed dc magnetron sputtering discharges"@en . . . . . "Diagnostika Langmuirovou sondou s \u010Dasov\u00FDm rozli\u0161en\u00EDm ve vysokov\u00FDkonov\u00FDch pulzn\u00EDch DC magnetronov\u00FDch v\u00FDboj\u00EDch pro rozpra\u0161ov\u00E1n\u00ED"@cs . "15th symposium on applications of plasma processes" . "Time-resolved Langmuir probe diagnostics in high-power pulsed dc magnetron sputtering discharges"@en . "Podbansk\u00E9" . . "RIV/49777513:23520/05:00000251!RIV06-MSM-23520___" . "Kudl\u00E1\u010Dek, Pavel" . "Pajdarov\u00E1, Andrea Dag" . "546834" . . "We report on the results obtained by time-resolved Langmuir probe diagnostics in high-power pulsed dc magnetron sputtering discharges proposed for ionized high-rate sputtering of metallic films. Time evolutions of the electron energy distribution and loc" . . "23520" . . "V\u00FDsledky diagnostiky Langmouirovou sondou s \u010Dasov\u00FDm rozli\u0161en\u00EDm ve vysokov\u00FDkonov\u00FDch pulzn\u00EDch DC magnetronov\u00FDch v\u00FDboj\u00EDch ur\u010Den\u00FDch pro napra\u0161ov\u00E1n\u00ED vrstev jsou prezentov\u00E1ny v tomto \u010Dl\u00E1nku."@cs . "Diagnostika Langmuirovou sondou s \u010Dasov\u00FDm rozli\u0161en\u00EDm ve vysokov\u00FDkonov\u00FDch pulzn\u00EDch DC magnetronov\u00FDch v\u00FDboj\u00EDch pro rozpra\u0161ov\u00E1n\u00ED"@cs . . "Time-resolved Langmuir probe diagnostics in high-power pulsed dc magnetron sputtering discharges" .