"[FD1378ED49CC]" . . "23520" . "NL - Nizozemsko" . . "Zr-Si-N films; high Si content; structure; mechanical properties; oxidation resistance; dc reactive magnetron sputtering"@en . . "10"^^ . "P(GP106/03/D009), P(ME 529), Z(MSM 235200002)" . . . . "Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content" . "238-247" . "0" . "Thin Solid Films" . . "Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content" . "RIV/49777513:23520/05:00000250" . "3"^^ . . "The Zr-Si-N films were deposited using an unbalanced dc reactive magnetron sputtering of the alloyed ZrSi2 target in a mixture of argon and nitrogen onto steel and silicon substrates. This article reports on a systematic investigation of depences of the" . "478" . "4"^^ . . . . "\u010Cl\u00E1nek se zab\u00FDv\u00E1 systematick\u00FDm zkoum\u00E1n\u00EDm z\u00E1vislost\u00ED struktury, prvkov\u00E9ho slo\u017Een\u00ED, mechanick\u00FDch vlastnost\u00ED a oxida\u010Dn\u00ED odolnosti vrstev Zr-Si-N s vysok\u00FDm obsahem Si na depozi\u010Dn\u00EDch parametrech. Vrstvy byly deponov\u00E1ny magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm z keramick\u00E9ho"@cs . . . . . "0040-6090" . . "Daniel, Rostislav" . "Musil, Jind\u0159ich" . "Struktura a vlastnosti magnetronov\u011B napra\u0161ovan\u00FDch vrstev Zr-Si-N s vysok\u00FDm obsahem k\u0159em\u00EDku"@cs . "Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content"@en . "Zeman, Petr" . . "The Zr-Si-N films were deposited using an unbalanced dc reactive magnetron sputtering of the alloyed ZrSi2 target in a mixture of argon and nitrogen onto steel and silicon substrates. This article reports on a systematic investigation of depences of the"@en . "Takai, Osamu" . . "Struktura a vlastnosti magnetronov\u011B napra\u0161ovan\u00FDch vrstev Zr-Si-N s vysok\u00FDm obsahem k\u0159em\u00EDku"@cs . . . . "RIV/49777513:23520/05:00000250!RIV06-GA0-23520___" . . "Structure and properties of magnetron sputtered Zr-Si-N films with a high Si content"@en . . "544960" .