"The paper analysis the effect of energy E, delivered to the growing film by bombarding ion and fast condensing atoms, on its structure, elemental and phase composition and physical properties. A special attention is devoted to the macrostress generated i" . "\u0160\u016Fna, Jan" . "The role of energy in formation of sputtered nanocomposite films"@en . "SE - \u0160v\u00E9dsk\u00E9 kr\u00E1lovstv\u00ED" . . . "2"^^ . "502" . . "6"^^ . . "0" . . . . . "Musil, Jind\u0159ich" . "2"^^ . . "RIV/49777513:23520/05:00000210!RIV06-MSM-23520___" . . . "The role of energy in formation of sputtered nanocomposite films" . "The paper analysis the effect of energy E, delivered to the growing film by bombarding ion and fast condensing atoms, on its structure, elemental and phase composition and physical properties. A special attention is devoted to the macrostress generated i"@en . "Vliv energie p\u0159i r\u016Fstu napra\u0161ovan\u00FDch nanokompozitn\u00EDch tenk\u00FDch vrstev"@cs . . . . "23520" . . "Vliv energie p\u0159i r\u016Fstu napra\u0161ovan\u00FDch nanokompozitn\u00EDch tenk\u00FDch vrstev"@cs . "Materials Science Forum" . "\u010Cl\u00E1nek analyzuje efekt energie E, dod\u00E1van\u00E9 do rostouc\u00ED vrstvy dopadaj\u00EDc\u00EDmi ionty a rychl\u00FDmi kondenzuj\u00EDc\u00EDmi atomy, na jej\u00ED strukturu, prvkov\u00E9 a f\u00E1zov\u00E9 slo\u017Een\u00ED a fyzik\u00E1ln\u00ED vlastnosti. Zvl\u00E1\u0161tn\u00ED pozornost je v\u011Bnov\u00E1na zbytkov\u00E9mu pnut\u00ED, kter\u00E9 se generuje v nap"@cs . "sputtering; ion bombardment; fast condensing atoms; structure; macrostress"@en . . . "[E1EF662BFD9E]" . . "0255-5476" . "541400" . "The role of energy in formation of sputtered nanocomposite films" . "RIV/49777513:23520/05:00000210" . "Z(MSM4977751302)" . "The role of energy in formation of sputtered nanocomposite films"@en . "291-296" .