. . "Vl\u010Dek, Jaroslav" . "Characterization of grid -assisted magnetron sputtering using energy-resolved mass spectroscopy"@en . "Charakterizace m\u0159\u00ED\u017Ekov\u011B asistovan\u00E9ho magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED pou\u017Eit\u00EDm hmotnostn\u00ED spektroskopie s energiov\u00FDm rozli\u0161en\u00EDm"@cs . "RIV/49777513:23520/05:00000003!RIV06-MSM-23520___" . "Energy-resolved mass spectroscopy was used to study differences in ion bombardment characteristics during conventional reactive magnetron sputtering and a grid-assisted magnetron sputtering proposed for deposition of films with a dense microstructure and" . "RIV/49777513:23520/05:00000003" . "Hou\u0161ka, Ji\u0159\u00ED" . . "Characterization of grid -assisted magnetron sputtering using energy-resolved mass spectroscopy" . "Charakterizace m\u0159\u00ED\u017Ekov\u011B asistovan\u00E9ho magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED pou\u017Eit\u00EDm hmotnostn\u00ED spektroskopie s energiov\u00FDm rozli\u0161en\u00EDm"@cs . "15th symposium on applications of plasma processes" . "Han, J. G." . "3"^^ . "Podbansk\u00E9" . . "grid-assisted magnetron sputtering; energy-resolved mass spectroscopy; ion bombardment; titanium nitride"@en . "Univerzita Komensk\u00E9ho v Bratislave" . "P(ME 673), Z(MSM 235200002)" . "23520" . "Kudl\u00E1\u010Dek, Pavel" . . . "199-200" . . "2005-01-15+01:00"^^ . "Bratislava" . . . . . "Pomoc\u00ED hmotnostn\u00ED spektroskopie s energiov\u00FDm rozli\u0161en\u00EDm byly zkoum\u00E1ny rozd\u00EDly v rozd\u011Blovac\u00EDch funkc\u00EDch iont\u016F bombarduj\u00EDc\u00ED substr\u00E1t b\u011Bhem konven\u010Dn\u00EDho a m\u0159\u00ED\u017Ekov\u011B asistovan\u00E9ho reaktivn\u00EDho magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED, kter\u00E9 bylo navr\u017Eeno pro depozici film\u016F s"@cs . "6"^^ . . "Kim, Yong M." . . . . "Energy-resolved mass spectroscopy was used to study differences in ion bombardment characteristics during conventional reactive magnetron sputtering and a grid-assisted magnetron sputtering proposed for deposition of films with a dense microstructure and"@en . "Jung, Min J." . . . "2"^^ . "[D87BD5701BE7]" . . "80-223-2018-8" . . "515012" . "Characterization of grid -assisted magnetron sputtering using energy-resolved mass spectroscopy"@en . . "Characterization of grid -assisted magnetron sputtering using energy-resolved mass spectroscopy" . .