"2"^^ . . "Properties of reactively sputtered hard Ti(Fe)Nx films"@en . . "Brno" . . "12-15" . "Musil, Jind\u0159ich" . "Brno" . "4"^^ . . "623885" . . . "Ti(Fe)Nx films;structure;mechanical properties;magnetron sputtering"@en . . . "Properties of reactively sputtered hard Ti(Fe)Nx films" . . "University of Technology" . . "Properties of reactively sputtered hard Ti(Fe)Nx films"@en . . . "23520" . "[37ADD90BF54B]" . . "RIV/49777513:23520/03:00000128!RIV/2004/MSM/235204/N" . "P(ME 529), Z(MSM 235200002)" . "2003-09-23+02:00"^^ . . "JUNIORMAT ’03" . . "Hard films are successfully used to improve functional properties of cutting tools and their lifetime. Despite this fact, new demands in machining of advance materials, however, require new films with enhanced properties to be developed. This paper repo rts on results of a systematic investigation of properties of thin Ti(Fe)Nx, films reactively sputtered using an unbalanced dc magnetron. Main advantages of magnetron sputtering are relatively low deposition temperatures and possibility to scale up the deposition process. Important is also the deposition rate aD of the film because it decides on its price. Therefore, this paper is devoted to aD of Ti(Fe)Nx films, their structure and mechanical properties." . . "RIV/49777513:23520/03:00000128" . . "0"^^ . . . "2"^^ . "0"^^ . . "Hard films are successfully used to improve functional properties of cutting tools and their lifetime. Despite this fact, new demands in machining of advance materials, however, require new films with enhanced properties to be developed. This paper repo rts on results of a systematic investigation of properties of thin Ti(Fe)Nx, films reactively sputtered using an unbalanced dc magnetron. Main advantages of magnetron sputtering are relatively low deposition temperatures and possibility to scale up the deposition process. Important is also the deposition rate aD of the film because it decides on its price. Therefore, this paper is devoted to aD of Ti(Fe)Nx films, their structure and mechanical properties."@en . "80-214-2462-1" . "Properties of reactively sputtered hard Ti(Fe)Nx films" . "\u0160\u016Fna, Jan" .