"92" . . "5"^^ . . . "The paper deals with pulsed dc magnetron discharges proposed for ionized and high-rate sputtering of thin films. Time-resolved optical emission spectroscopy was used to characterize the ionization degree of copper (target) and argon (working gas) atoms, and the relative density of copper atoms in front of a sputtered copper target and in a plasma bulk during pulses. Energy-resolved mass spetroscopy with time resolution was carried out in front of a substrate to investigate the energy distribution of copper and argon ions, and their fractions in ion fluxes on the grounded substrate."@en . . "2002-01-01+01:00"^^ . . "Liverpool" . . "Liverpool" . "University of Liverpool" . . "[8E069195BF77]" . . "3"^^ . "magnetron sputtering;optical emission spectroscopy"@en . "0"^^ . . . "0"^^ . "RIV/49777513:23520/02:00070767!RIV/2003/MSM/235203/N" . "RIV/49777513:23520/02:00070767" . . . "Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering"@en . "P(ME 203), Z(MSM 235200002)" . . . "The paper deals with pulsed dc magnetron discharges proposed for ionized and high-rate sputtering of thin films. Time-resolved optical emission spectroscopy was used to characterize the ionization degree of copper (target) and argon (working gas) atoms, and the relative density of copper atoms in front of a sputtered copper target and in a plasma bulk during pulses. Energy-resolved mass spetroscopy with time resolution was carried out in front of a substrate to investigate the energy distribution of copper and argon ions, and their fractions in ion fluxes on the grounded substrate." . "Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering" . "0-9539105-1-2" . . "Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering"@en . "Pajdarov\u00E1, Andrea Dagmar" . "23520" . . . "Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering" . "Vl\u010Dek, Jaroslav" . "4"^^ . . "Optical emission spectroscopy and energy-resolved mass spectroscopy in pulsed dc magnetron discharges for ionized high-rate sputtering" . . "Le\u0161tina, Jan" . "657154" .