. "Kasl, Josef" . . "Relationship between structure and mechanical properties in hard Al-Si-Cu-N films prepared by magnetron sputtering" . "10"^^ . . . "Zeman, Hynek" . "This article reports on properties of Al-Si-Cu-N films with 5-9 at.% Si and 2-12 at.% Cu magnetron sputtered from a composed (Al, Si)-Cu target. The demonstration of a possibility to form the X-ray amorphous superhard films is of key scientific importance. It makes possible to start investigation of the grain size dependent phenomena in nanostructured films prepared by two-step process based on nanocrystallization from amorphous phase using a post-deposition annealing."@en . "Thin Solid Films" . "Vztah mezi strukturou a mechanick\u00FDmi vlastnostmi vrstev Al-Si-Cu-N p\u0159ipravovan\u00FDmi magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm"@cs . "Relationship between structure and mechanical properties in hard Al-Si-Cu-N films prepared by magnetron sputtering"@en . "662007" . . . . . . "Al-Si-Cu-N nanostructured films; structure; chemical composition; mechanical properties; magnetron sputtering"@en . "P(ME 173), P(ME 203), Z(MSM 235200002)" . . "23520" . . . "0" . "2"^^ . "Vztah mezi strukturou a mechanick\u00FDmi vlastnostmi vrstev Al-Si-Cu-N p\u0159ipravovan\u00FDmi magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm"@cs . "NL - Nizozemsko" . "Relationship between structure and mechanical properties in hard Al-Si-Cu-N films prepared by magnetron sputtering" . "3"^^ . . . "Relationship between structure and mechanical properties in hard Al-Si-Cu-N films prepared by magnetron sputtering"@en . . "This article reports on properties of Al-Si-Cu-N films with 5-9 at.% Si and 2-12 at.% Cu magnetron sputtered from a composed (Al, Si)-Cu target. The demonstration of a possibility to form the X-ray amorphous superhard films is of key scientific importance. It makes possible to start investigation of the grain size dependent phenomena in nanostructured films prepared by two-step process based on nanocrystallization from amorphous phase using a post-deposition annealing." . "121" . . "[95D4C7644C5C]" . . . . "Musil, Jind\u0159ich" . . "\u010Cl\u00E1nek pojedn\u00E1v\u00E1 o vlastnostech vrstev Al-Si-Cu-N s 5-9 at.% Si a 2-12 at.% Cu p\u0159ipraven\u00FDch magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm ze slo\u017Een\u00E9ho ter\u010De (Al, Si)-Cu. Bylo mj. prok\u00E1z\u00E1no, \u017Ee (1) strukturu vrstev Al-Si-Cu-N lze \u0159\u00EDdit pomoc\u00ED energie dodan\u00E9 vrstv\u011B b\u011Bhem depozice, (2) vrstvy Al-Si-Cu-N mohou tvo\u0159it supertvrd\u00FD materi\u00E1l s tvrdost\u00ED p\u0159esahuj\u00EDc\u00ED 40 GPa a nav\u00EDc bylo uk\u00E1z\u00E1no, \u017Ee lze tyto supertvrd\u00E9 vrstvy vytv\u00E1\u0159et s r\u016Fznou strukturou (dokonce i amorfn\u00ED). Pr\u00E1v\u011B prok\u00E1z\u00E1n\u00ED mo\u017Enosti vytv\u00E1\u0159et rentgenov\u011B amorfn\u00ED supertvrd\u00E9 vrstvy lze pova\u017Eovat za z\u00E1sadn\u00ED zji\u0161t\u011Bn\u00ED, kter\u00E9 m\u016F\u017Ee pomoci p\u0159i zkoum\u00E1n\u00ED jev\u016F z\u00E1visl\u00FDch na velikosti zrn v nanostrukturn\u00EDch vrstv\u00E1ch."@cs . . "RIV/49777513:23520/02:00000329!RIV07-MSM-23520___" . "RIV/49777513:23520/02:00000329" . "0040-6090" .