. . "The paper describes two methods which can be used to control the film structure: (1) the energy delivered to the growing film, i.e. (i) substrate heating and (ii) ion bombardment; and (2) the interlayer inserted between the substrate and the film. These methods were tested on Cu and Zr-Y-N films and Cu and Cr-Ni-N films used as interlayers. It was found that both methods can improve the crystallinity of sputter deposited films. Dependences of the film structure on substrate temperature, negative substrate bias and substrate ion current density are given. The effect of the interlayer on the structure of the deposited film is also clearly demonstrated." . "s. 201-205" . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . . "Control of structure in magnetron sputtered thin film" . "Vol. 142" . "P(GV106/96/K245), P(ME 173), P(ME 203), Z(MSM 235200002)" . "Kub\u00E1sek, Milan" . . . . "23520" . . . "RIV/49777513:23520/01:00064893!RIV/2002/GA0/235202/N" . "Surface and Coatings Technology" . "RIV/49777513:23520/01:00064893" . . "\u010Cerstv\u00FD, Radom\u00EDr" . . . "Structure; Energy delivered to the growing film; Interlayer; Magnetron sputtering"@en . . "0"^^ . "0257-8972" . "4"^^ . . . "0"^^ . . . "Control of structure in magnetron sputtered thin film"@en . . "5"^^ . "676411" . . "Control of structure in magnetron sputtered thin film"@en . . . "Pol\u00E1kov\u00E1, Helena" . "Control of structure in magnetron sputtered thin film" . "4"^^ . "[2ED82B438F90]" . . "leden" . "The paper describes two methods which can be used to control the film structure: (1) the energy delivered to the growing film, i.e. (i) substrate heating and (ii) ion bombardment; and (2) the interlayer inserted between the substrate and the film. These methods were tested on Cu and Zr-Y-N films and Cu and Cr-Ni-N films used as interlayers. It was found that both methods can improve the crystallinity of sputter deposited films. Dependences of the film structure on substrate temperature, negative substrate bias and substrate ion current density are given. The effect of the interlayer on the structure of the deposited film is also clearly demonstrated."@en . "Musil, Jind\u0159ich" . . .