"\u0160patenka, Petr" . "Slo\u017Een\u00ED a struktura tenk\u00FDch vrstev jsou ur\u010Deny vylu\u010Dovac\u00ED metodou a vylu\u010Dovac\u00EDmi parametry. Vlastnosti povlak\u016F zahrnuj\u00EDc\u00ED jejich tribologick\u00E9, optick\u00E9. elektrick\u00E9 a jin\u00E9 vlastnosti jsou \u00FAzce spojeny s jejich slo\u017Een\u00EDm a strukturou, co\u017E znamen\u00E1, \u017Ee jejichunk\u010Dnost je p\u0159\u00EDmo ur\u010Dena pou\u017Eitou vylu\u010Dovac\u00ED metodou."@cs . . "Comparison of titanium oxide coatings deposited by PVD and PECVD."@en . "Comparison of titanium oxide coatings deposited by PVD and PECVD." . "4"^^ . "Society of Vacuum Coaters" . "Comparison of titanium oxide coatings deposited by PVD and PECVD."@en . . "3"^^ . . "Porovn\u00E1n\u00ED povlak\u016F oxidu titanu vylou\u010Den\u00FDch PVD a PECVD."@cs . . . . "Kolouch, Ale\u0161" . "Composition and structure of thin layers are determined by deposition method and deposition parameters. Properties of coatings involving mechanical, tribological, optical, electri- cal, and other properties are closely connected to their compo- sition anstructure which means that their functionality is directly determined by the used deposition method. One of the new and very interesting coatings is the titanium oxide thin film. Large application of this film involves protective hard coatings on cuttingtool, optical films for optical filters or photo-catalytic layers. Each application set different demands on the film properties. The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapor deposition (PVD) and plasma enhanced chemical vapor deposition (PECVD) from various precursors. The films were characterized by various techniques including measurements of hardness and thickness by the ball-and-crater method (Calotest)." . . "[569CD9EAF1BF]" . . . "47th SVC Annual Technical Conference Proceeding" . "RIV/46747885:24210/04:24210172" . . "2004-01-01+01:00"^^ . "RIV/46747885:24210/04:24210172!RIV/2005/MSM/242105/N" . "%22TiOx;PVD;PECVD;tribology%22"@en . "Comparison of titanium oxide coatings deposited by PVD and PECVD." . "24210" . . "558335" . "Polcar, Tom\u00E1\u0161" . "Krumeich, Jorg" . "%2246;49%22" . . "Dallas, USA" . . "Dallas, USA" . "Ganev, N." . "Z(MSM 242100002)" . "Mackov\u00E1, Anna" . . "Porovn\u00E1n\u00ED povlak\u016F oxidu titanu vylou\u010Den\u00FDch PVD a PECVD."@cs . "Composition and structure of thin layers are determined by deposition method and deposition parameters. Properties of coatings involving mechanical, tribological, optical, electri- cal, and other properties are closely connected to their compo- sition anstructure which means that their functionality is directly determined by the used deposition method. One of the new and very interesting coatings is the titanium oxide thin film. Large application of this film involves protective hard coatings on cuttingtool, optical films for optical filters or photo-catalytic layers. Each application set different demands on the film properties. The aim of the presented work is a comparison of titanium oxide coatings deposited by physical vapor deposition (PVD) and plasma enhanced chemical vapor deposition (PECVD) from various precursors. The films were characterized by various techniques including measurements of hardness and thickness by the ball-and-crater method (Calotest)."@en . . "7"^^ . . "Kar\u00E1sek, Ji\u0159\u00ED" . . . .