"\u0160patenka, P." . . "50" . "\u0160er\u00FD, M." . . "Pavl\u00EDk, Jaroslav" . "The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found." . . "8" . "Messelh\u00E4user, J." . "Chromatic Monitoring of DownstreamMicrowave Plasma Source" . "P(OC 527.50), P(OK 401), Z(MSM 124100004), Z(MSM 134300001), Z(MSM 242100002)" . "[816B53250A2D]" . "13430" . . "The application of the chromatic sensing for monitoring of a microwave plasma source is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN - diodes with integrated optical filters. The response of the chromatics signals on variation of the power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found."@en . "481" . "4"^^ . "Chromatic Monitoring of DownstreamMicrowave Plasma Source"@en . . "Chromatic Monitoring of DownstreamMicrowave Plasma Source" . "1"^^ . . . . . "Czechoslovak Journal of Physics" . "Chromatic Monitoring of DownstreamMicrowave Plasma Source"@en . . "6"^^ . "RIV/44555601:13430/00:00000566!RIV/2001/MSM/134301/N" . . . "0011-4626" . . . "Pavl\u00EDk, Jaroslav" . "RIV/44555601:13430/00:00000566" . . . "706790" .