. . . "Byla vyvinuta metodika m\u011B\u0159en\u00ED vyu\u017Eit\u00ED vstupn\u00EDch (reak\u010Dn\u00EDch) a v\u00FDstupn\u00EDch (odpadn\u00EDch) plynn\u00FDch sm\u011Bs\u00ED pomoc\u00ED hmotnostn\u00EDho spektrometru pro optimalizaci proces\u016F fosforov\u00E9 a borov\u00E9 dif\u00FAze. Tato metodika optimalizuje spot\u0159ebu procesn\u00EDch (reak\u010Dn\u00EDch) plyn\u016F a chemik\u00E1li\u00ED pro procesy fosforov\u00E9 a borov\u00E9 dif\u00FAze."@cs . "P\u0159i aplikaci princip\u016F popsan\u00FDch v dan\u00E9 metodice doch\u00E1z\u00ED p\u0159i lad\u011Bn\u00ED procesu ke sn\u00ED\u017Een\u00ED po\u010Dtu lad\u00EDc\u00EDch procesn\u00EDch v\u00E1rek o 40%" . "2"^^ . "A methodics of measurement of usage of inlet (reaction) and outlet (waste) gas mixtures with help of weight spectrometer for optimization of phospohorus and boron diffusion."@en . . "Byla vyvinuta metodika m\u011B\u0159en\u00ED vyu\u017Eit\u00ED vstupn\u00EDch (reak\u010Dn\u00EDch) a v\u00FDstupn\u00EDch (odpadn\u00EDch) plynn\u00FDch sm\u011Bs\u00ED pomoc\u00ED hmotnostn\u00EDho spektrometru pro optimalizaci proces\u016F fosforov\u00E9 a borov\u00E9 dif\u00FAze. Tato metodika optimalizuje spot\u0159ebu procesn\u00EDch (reak\u010Dn\u00EDch) plyn\u016F a chemik\u00E1li\u00ED pro procesy fosforov\u00E9 a borov\u00E9 dif\u00FAze." . "SVCS Process Innovation s.r.o., Opt\u00E1tova 37, Brno 637 00" . . "[6D5B7B41EE73]" . "3"^^ . "Metodika bude slou\u017Eit jako podp\u016Frn\u00FD produkt prodeje MWPECVD za\u0159\u00EDzen\u00ED. V r\u00E1mci implementace certifikovan\u00E9 metodiky do zm\u00EDn\u011Bn\u00E9ho MWPECVD za\u0159\u00EDzen\u00ED o\u010Dek\u00E1v\u00E1me nav\u00FD\u0161en\u00ED ceny tohoto za\u0159\u00EDzen\u00ED cca o 4%." . "Metodika m\u011B\u0159en\u00ED vyu\u017Eit\u00ED vstupn\u00EDch (reak\u010Dn\u00EDch) a v\u00FDstupn\u00EDch (odpadn\u00EDch) plynn\u00FDch sm\u011Bs\u00ED pomoc\u00ED hmotnostn\u00EDho spektrometru pro optimalizaci proces\u016F fosforov\u00E9 a borov\u00E9 dif\u00FAze." . "2013-12-09+01:00"^^ . . "A methodics of measurement of usage of inlet (reaction) and outlet (waste) gas mixtures with help of weight spectrometer for optimization of phospohorus and boron diffusion."@en . "Pij\u00E1k, Anton" . . "Poruba, Ale\u0161" . . "A-2013-12-9-SVMM-03" . "SVMM-03" . . . . . "RIV/27711170:_____/13:#0000034!RIV14-TA0-27711170" . "Metodika m\u011B\u0159en\u00ED vyu\u017Eit\u00ED vstupn\u00EDch (reak\u010Dn\u00EDch) a v\u00FDstupn\u00EDch (odpadn\u00EDch) plynn\u00FDch sm\u011Bs\u00ED pomoc\u00ED hmotnostn\u00EDho spektrometru pro optimalizaci proces\u016F fosforov\u00E9 a borov\u00E9 dif\u00FAze."@cs . "Metodika m\u011B\u0159en\u00ED vyu\u017Eit\u00ED vstupn\u00EDch (reak\u010Dn\u00EDch) a v\u00FDstupn\u00EDch (odpadn\u00EDch) plynn\u00FDch sm\u011Bs\u00ED pomoc\u00ED hmotnostn\u00EDho spektrometru pro optimalizaci proces\u016F fosforov\u00E9 a borov\u00E9 dif\u00FAze."@cs . "A methodics of measurement of usage of inlet (reaction) and outlet (waste) gas mixtures with help of weight spectrometer for optimization of phospohorus and boron diffusion was elaborated. This methodics optimizates the consumption of process (reaction) gas and chemicals of phosphorus and boron diffusion."@en . "87778" . "phosphorus and boron diffusion; measurement of inlet and outlet gas mixtures"@en . "P(TA01020972)" . . "Pitrun, Ji\u0159\u00ED" . . "RIV/27711170:_____/13:#0000034" . . "Metodika m\u011B\u0159en\u00ED vyu\u017Eit\u00ED vstupn\u00EDch (reak\u010Dn\u00EDch) a v\u00FDstupn\u00EDch (odpadn\u00EDch) plynn\u00FDch sm\u011Bs\u00ED pomoc\u00ED hmotnostn\u00EDho spektrometru pro optimalizaci proces\u016F fosforov\u00E9 a borov\u00E9 dif\u00FAze." . .