. "Ba\u0159inka, Radim" . . . . . "Poruba, Ale\u0161" . "Extraktor pro \u00FApravu sm\u011Bru toku procesn\u00EDch plyn\u016F v dif\u00FAzn\u00EDch reaktorech" . "Extraktor pro \u00FApravu toku procesn\u00EDch plyn\u016F v dif\u00FAzn\u00EDch reaktorech se pou\u017E\u00EDv\u00E1 p\u0159i v\u00FDrob\u011B tenk\u00FDch vrstev pro polovodi\u010Dovou techniku v procesn\u00EDch pec\u00EDch. Upravuje sm\u011Br toku procesn\u00EDch plyn\u016F a jejich reak\u010Dn\u00EDch zplodin tak, aby na v\u00FDstupu z dif\u00FAzn\u00EDho reaktoru nedoch\u00E1zelo k jejich kondenzaci a n\u00E1sledn\u00E9 korozi vnit\u0159n\u00EDch \u010D\u00E1st\u00ED pece."@cs . . . "Martinek, Pavel" . . . "RIV/27711170:_____/13:#0000032" . "74445" . . "V p\u0159\u00EDpad\u011B implementace extraktoru do vysokoteplotn\u00EDch pec\u00ED SVFur se p\u0159edpokl\u00E1d\u00E1 2% n\u00E1r\u016Fst ceny v segmentu oxida\u010Dn\u00EDch reaktor\u016F spole\u010Dnost\u00ED SVCS Process Innovation s.r.o. Implementace tohoto funk\u010Dn\u00EDho vzorku v dan\u00E9 problematice z\u00E1rove\u0148 posiluje kredit v\u00FDrobce za\u0159\u00EDzen\u00ED (SVCS) u sv\u00FDch z\u00E1kazn\u00EDk\u016F." . "Pij\u00E1k, Anton" . "An extractor for modification of process gases flow direction in diffusion reactors is used in the manufacturing process of thin layers for semiconductor technologies in process furnaces. Extractor controls process gases and it`s fumes flow direction so there was no condensation of these gases at the outlet of diffusion reactor and no subsequent corrosion of internal furnace parts would appear."@en . . "\u0158e\u0161en\u00ED spo\u010D\u00EDv\u00E1 v nov\u00E9m konstruk\u010Dn\u00EDm proveden\u00ED reaktoru a dve\u0159\u00ED na stran\u011B scavengeru, kter\u00E9 konec reaktoru ut\u011Bsn\u00ED, a ve vlo\u017Een\u00ED k\u0159emenn\u00E9 trubice men\u0161\u00EDho pr\u016Fm\u011Bru (extraktoru) do vy\u00FAstky reaktoru v m\u00EDst\u011B vstupu procesn\u00EDch plyn\u016F. Trubice extraktoru le\u017E\u00ED na dn\u011B reaktoru a vede a\u017E do prostoru mezi pracovn\u00ED z\u00F3nou a dve\u0159mi ke scavengeru. Odtud odv\u00E1d\u00ED reaktanty do kondenza\u010Dn\u00ED n\u00E1doby, kde je jejich podstatn\u00E1 \u010D\u00E1st zachycena. Zbyl\u00E1 \u010D\u00E1st pak odejde do odtahu s velmi omezenou mo\u017Enost\u00ED jeho korozn\u00EDho napaden\u00ED." . "SV-DR-EXTR" . . "RIV/27711170:_____/13:#0000032!RIV14-TA0-27711170" . "Hrnko, Luk\u00E1\u0161" . "[9D7CA546774A]" . . . . "An Extractor for modification of process gases flow direction in diffusion reactors"@en . "An Extractor for modification of process gases flow direction in diffusion reactors"@en . "5"^^ . "Extraktor pro \u00FApravu sm\u011Bru toku procesn\u00EDch plyn\u016F v dif\u00FAzn\u00EDch reaktorech"@cs . "diffusion reactor; extractor"@en . "Extraktor pro \u00FApravu toku procesn\u00EDch plyn\u016F v dif\u00FAzn\u00EDch reaktorech se pou\u017E\u00EDv\u00E1 p\u0159i v\u00FDrob\u011B tenk\u00FDch vrstev pro polovodi\u010Dovou techniku v procesn\u00EDch pec\u00EDch. Upravuje sm\u011Br toku procesn\u00EDch plyn\u016F a jejich reak\u010Dn\u00EDch zplodin tak, aby na v\u00FDstupu z dif\u00FAzn\u00EDho reaktoru nedoch\u00E1zelo k jejich kondenzaci a n\u00E1sledn\u00E9 korozi vnit\u0159n\u00EDch \u010D\u00E1st\u00ED pece." . "Extraktor pro \u00FApravu sm\u011Bru toku procesn\u00EDch plyn\u016F v dif\u00FAzn\u00EDch reaktorech" . . . . "P(TA01020972)" . . "3"^^ . . . "Extraktor pro \u00FApravu sm\u011Bru toku procesn\u00EDch plyn\u016F v dif\u00FAzn\u00EDch reaktorech"@cs .