"A function sample of modified reactor for boron diffusion with implemented injector and extractor and with shielding quartz elements for reduction of quartz reactor tube degradation and for increasing homogeneity of Si layers diffused by boron."@en . . . "Martinek, Pavel" . "Wostr\u00FD, Petr" . . . . . "Funk\u010Dn\u00ED vzorek upraven\u00E9ho reaktoru borov\u00E9 dif\u00FAze s implementovan\u00FDm injektorem, extraktorem a st\u00EDn\u00EDc\u00EDmi k\u0159emenn\u00FDmi prvky pro sn\u00ED\u017Een\u00ED degradace k\u0159emenn\u00E9 trubky reaktoru a zv\u00FD\u0161en\u00ED homogenity b\u00F3rem difundovan\u00FDch k\u0159em\u00EDkov\u00FDch vrstev." . . . "Pij\u00E1k, Anton" . "RIV/27711170:_____/13:#0000031" . . "Modifikovan\u00FD reaktor borov\u00E9 dif\u00FAze vy\u017Eaduje ni\u017E\u0161\u00ED n\u00E1roky na provoz a \u00FAdr\u017Ebu. Frekvence pravideln\u00E9ho \u010Di\u0161t\u011Bn\u00ED k\u0159emenn\u00E9 trubky se zv\u00FD\u0161\u00ED o 150 a 200% a p\u0159edpokl\u00E1dan\u00FD n\u00E1r\u016Fst \u017Eivotnosti trubky je minim\u00E1ln\u011B 100%." . . "7"^^ . "Funk\u010Dn\u00ED vzorek upraven\u00E9ho reaktoru borov\u00E9 dif\u00FAze s implementovan\u00FDm injektorem, extraktorem a st\u00EDn\u00EDc\u00EDmi k\u0159emenn\u00FDmi prvky pro sn\u00ED\u017Een\u00ED degradace k\u0159emenn\u00E9 trubky reaktoru a zv\u00FD\u0161en\u00ED homogenity b\u00F3rem difundovan\u00FDch k\u0159em\u00EDkov\u00FDch vrstev."@cs . . "[AD04542EB42C]" . "P(TA01020972)" . "Modifikac\u00ED reaktoru borov\u00E9 dif\u00FAze s dvouvstupov\u00FDm injektorem, vstupn\u00EDm k\u0159emenn\u00FDm st\u00EDn\u00EDc\u00EDm prvkem a k\u0159emenn\u00FD trubkov\u00FDm extraktorem doch\u00E1z\u00ED k podstatn\u011B ni\u017E\u0161\u00EDmu zne\u010Di\u0161t\u011Bn\u00ED a celkov\u00E9 degradaci k\u0159emenn\u00E9 trubky, co\u017E m\u00E1 pozitivn\u00ED vliv na \u010Detnost \u010Di\u0161t\u011Bn\u00ED reaktoru a jeho celkovou \u017Eivotnost (p\u0159\u00EDpadn\u011B nutnost udr\u017Eovat po celou dobu funk\u010Dnosti reaktor na teplot\u011B nad 600\u00B0C)." . . "Modification of reactor of boron diffusion is based on implementation of dual input injector for separate inlet of gas mixtures (N2, O2, BBr3, DCE) to reactor to prevent chemical reaction between BBr3 and O2 in area where the temperature is bellow 500\u00B0C and where a B2O3 condensation at quartz sides and subsequently tube`s embrittlement and destruction occures. Shielding quartz element at inlet is a secondary protection from B2O3 condensate creation at gas inlet and quartz tube extractor eliminates condensate creation at opposite side of quartz tube and at scavenger."@en . . "3"^^ . "Modifikace reaktoru borov\u00E9 dif\u00FAze spo\u010D\u00EDv\u00E1 v implementaci dvouvstupov\u00E9ho injektoru pro odd\u011Blen\u00E9 p\u0159iv\u00E1d\u011Bn\u00ED plynn\u00FDch sm\u011Bs\u00ED (N2, O2, BBr3, DCE) do reaktoru k zabr\u00E1n\u011Bn\u00ED chemick\u00E9 reakce mezi BBr3 a O2 v oblasti teplot pod 500\u00B0C, kdy doch\u00E1z\u00ED ke kondenzaci B2O3 na st\u011Bn\u00E1ch k\u0159emenn\u00E9 trubky a n\u00E1sledn\u011B k jej\u00EDmu zk\u0159ehnut\u00ED a destrukci trubky. K\u0159emenn\u00FD st\u00EDn\u00EDc\u00ED prvek na vstupu je sekund\u00E1rn\u00ED ochrannou tvorby kondenz\u00E1tu B2O3 u vstupu plyn\u016F a k\u0159emenn\u00FD trubkov\u00FD extraktor eliminuje tvorbu kondenz\u00E1tu na opa\u010Dn\u00E9 stran\u011B k\u0159emenn\u00E9 trubky a ve scavengeru." . "Funk\u010Dn\u00ED vzorek upraven\u00E9ho reaktoru borov\u00E9 dif\u00FAze s implementovan\u00FDm injektorem, extraktorem a st\u00EDn\u00EDc\u00EDmi k\u0159emenn\u00FDmi prvky pro sn\u00ED\u017Een\u00ED degradace k\u0159emenn\u00E9 trubky reaktoru a zv\u00FD\u0161en\u00ED homogenity b\u00F3rem difundovan\u00FDch k\u0159em\u00EDkov\u00FDch vrstev." . "76031" . "Frant\u00EDnk, Ond\u0159ej" . "Modifikace reaktoru borov\u00E9 dif\u00FAze spo\u010D\u00EDv\u00E1 v implementaci dvouvstupov\u00E9ho injektoru pro odd\u011Blen\u00E9 p\u0159iv\u00E1d\u011Bn\u00ED plynn\u00FDch sm\u011Bs\u00ED (N2, O2, BBr3, DCE) do reaktoru k zabr\u00E1n\u011Bn\u00ED chemick\u00E9 reakce mezi BBr3 a O2 v oblasti teplot pod 500\u00B0C, kdy doch\u00E1z\u00ED ke kondenzaci B2O3 na st\u011Bn\u00E1ch k\u0159emenn\u00E9 trubky a n\u00E1sledn\u011B k jej\u00EDmu zk\u0159ehnut\u00ED a destrukci trubky. K\u0159emenn\u00FD st\u00EDn\u00EDc\u00ED prvek na vstupu je sekund\u00E1rn\u00ED ochrannou tvorby kondenz\u00E1tu B2O3 u vstupu plyn\u016F a k\u0159emenn\u00FD trubkov\u00FD extraktor eliminuje tvorbu kondenz\u00E1tu na opa\u010Dn\u00E9 stran\u011B k\u0159emenn\u00E9 trubky a ve scavengeru."@cs . "Funk\u010Dn\u00ED vzorek upraven\u00E9ho reaktoru borov\u00E9 dif\u00FAze s implementovan\u00FDm injektorem, extraktorem a st\u00EDn\u00EDc\u00EDmi k\u0159emenn\u00FDmi prvky pro sn\u00ED\u017Een\u00ED degradace k\u0159emenn\u00E9 trubky reaktoru a zv\u00FD\u0161en\u00ED homogenity b\u00F3rem difundovan\u00FDch k\u0159em\u00EDkov\u00FDch vrstev."@cs . . "SV-B-rctr" . . . . "Hrnko, Luk\u00E1\u0161" . "A function sample of modified reactor for boron diffusion with implemented injector and extractor and with shielding quartz elements for reduction of quartz reactor tube degradation and for increasing homogeneity of Si layers diffused by boron."@en . "Poruba, Ale\u0161" . . "Ba\u0159inka, Radim" . "RIV/27711170:_____/13:#0000031!RIV14-TA0-27711170" . . . "boron diffusion reactor; quartz extractor; dual inlet injector"@en . . .