"Pij\u00E1k, Anton\u00EDn" . . . . "A-2012-12-10-SVMB_SOL_01" . . . "Byla navr\u017Eena, teoreticky analyzov\u00E1na, realizov\u00E1na jak po str\u00E1nce v\u00FDpo\u010Detn\u00ED, tak po str\u00E1nce experiment\u00E1ln\u00ED a nakonec \u00FAsp\u011B\u0161n\u011B odzkou\u0161ena nov\u00E1 metoda ur\u010Dov\u00E1n\u00ED dif\u00FAzn\u00EDch profil\u016F rychle, nedestruktivn\u011B a bezkontaktn\u011B pomoc\u00ED infra\u010Derven\u00E9 reflexe." . "RIV/27711170:_____/12:#0000010" . "SVCS Process Innovation s.r.o., Na Pot\u016F\u010Dk\u00E1ch 163, Vala\u0161sk\u00E9 Mezi\u0159\u00ED\u010D\u00ED 757 01" . . "determination of boron concentration profile"@en . "Methodology of not destructive determination of boron concentration profile in Si wafers"@en . "Komercionalizace metodiky se nep\u0159edpokl\u00E1d\u00E1, bude slou\u017Eit jako pod\u016Frn\u00FD produkt prodeje. V p\u0159\u00EDpad\u011B implementace ov\u011B\u0159en\u00E9 technolopie pro dif\u00FAzi b\u00F3ru v\u010Detn\u011B v\u0161ech jeho modul\u00E1rn\u00EDch komponent na struktur\u00E1ch k\u0159em\u00EDkov\u00FDch sol\u00E1rn\u00EDch \u010Dl\u00E1nk\u016F do vysokoteplotn\u00EDch pec\u00ED SVFur spole\u010Dn\u011B s metodikami pro p\u0159\u00EDpravu substr\u00E1t\u016F a vytv\u00E1\u0159en\u00ED t\u011Bchto vrstev se p\u0159edpokl\u00E1d\u00E1 12% n\u00E1r\u016Fst prodeje v segmentu difuzn\u00EDch reaktor\u016F pro dopov\u00E1n\u00ED b\u00F3rem spole\u010Dnost\u00ED SVCS Process Innovation s.r.o." . "149910" . "P(TA01020972)" . "Byla navr\u017Eena, teoreticky analyzov\u00E1na, realizov\u00E1na jak po str\u00E1nce v\u00FDpo\u010Detn\u00ED, tak po str\u00E1nce experiment\u00E1ln\u00ED a nakonec \u00FAsp\u011B\u0161n\u011B odzkou\u0161ena nov\u00E1 metoda ur\u010Dov\u00E1n\u00ED dif\u00FAzn\u00EDch profil\u016F rychle, nedestruktivn\u011B a bezkontaktn\u011B pomoc\u00ED infra\u010Derven\u00E9 reflexe."@cs . "Metodika nedestruktivn\u00EDho ur\u010Den\u00ED koncentra\u010Dn\u00EDho profilu b\u00F3ru v Si desk\u00E1ch" . "SVMB_SOL_01" . "Holovsk\u00FD, Jakub" . . "2012-12-10+01:00"^^ . "[10707ACF2397]" . . "Metodika nedestruktivn\u00EDho ur\u010Den\u00ED koncentra\u010Dn\u00EDho profilu b\u00F3ru v Si desk\u00E1ch" . . "Reme\u0161, Zden\u011Bk" . "RIV/27711170:_____/12:#0000010!RIV13-TA0-27711170" . . "Metodika nedestruktivn\u00EDho ur\u010Den\u00ED koncentra\u010Dn\u00EDho profilu b\u00F3ru v Si desk\u00E1ch"@cs . . "A new method of determination of difusion profiles in fast, not destructive and contactless (with help of infra-red reflexion) way was designed, theoretically analyzed, realized either in computational and in experimental field and finaly successfully tested."@en . "1"^^ . "Methodology of not destructive determination of boron concentration profile in Si wafers"@en . "Metodika nedestruktivn\u00EDho ur\u010Den\u00ED koncentra\u010Dn\u00EDho profilu b\u00F3ru v Si desk\u00E1ch"@cs . "Dokonalej\u0161\u00ED ov\u011B\u0159en\u00ED metody by bylo mo\u017En\u00E9 ud\u011Blat nikoliv na z\u00E1klad\u011B absolutn\u00EDho srovn\u00E1v\u00E1n\u00ED v\u00FDsledk\u016F, ale na z\u00E1klad\u011B srovn\u00E1v\u00E1n\u00ED trend\u016F a citlivosti na v\u00FDvoj parametr\u016F p\u0159i m\u011B\u0159en\u00ED na r\u016Fzn\u011B p\u0159ipraven\u00FDch vzorc\u00EDch. Je z\u0159ejm\u00E9, \u017Ee pro takovou pr\u00E1ci by bylo t\u0159eba p\u0159ipravit a analyzovat metodou ECV velk\u00E9 mno\u017Estv\u00ED speci\u00E1ln\u011B p\u0159ipraven\u00FDch vzork\u016F, co\u017E v\u0161ak nebylo prioritou v tomto projektu.Vzhledem k tomu, \u017Ee metoda d\u00E1va krom\u011B \u00FAhlu 80\u00B0 mo\u017Enosti z\u00EDsk\u00E1vat dopl\u0148kov\u00E1 spektra i pod jin\u00FDmi \u00FAhly, lze \u0159\u00EDci, \u017Ee rozhodn\u011B existuje prostor pro zv\u00FD\u0161en\u00ED jej\u00ED citlivosti a robustnosti." . . . "3"^^ . .