. "Planar sensor structures for measurement of carbon nanostructure films electrical properties were designed and fabricated: 1. Interdigital electrode systems made of thin platinum or gold film, exhibiting 20 to 500 \u03BCm wide gaps that can resist temperatures connected with carbon nanostructure films deposition, working and outgassing temperatures at sensors performance. 2. Combined sensor structure comprising interdigital electrode system, temperature sensor and heating element. Technology for production of these structures in clean rooms was developed and verified. The technology is based on magnetron sputtering of Pt and NiCr/Ni/Au thin films, double sided photolithography using lift-off procedure, heat treatment, temperature sensor laser trimming, screen printing of cover films, dicing diamond saw cutting and SIL leads attachment. Finished products are measured and tested including functional tests."@en . "Ov\u011B\u0159en\u00E1 technologie - senzorov\u00E9 struktury" . . . "interdigital capacitor; sensitive layer; ceramic substrate; temperature sensor; substrate heating"@en . "Ov\u011B\u0159en\u00E1 technologie - senzorov\u00E9 struktury"@cs . "6"^^ . . "5"^^ . "Proven technology - sensor structures"@en . "Ov\u011B\u0159en\u00E1 technologie - senzorov\u00E9 struktury"@cs . . . "TB-BI2C -NiCr/Ni/Au interdigit\u00E1ln\u00ED elektrodov\u00FD syst\u00E9m pro senzory plyn\u016F na Al2O3. Topologie na aktivn\u00ED plo\u0161e 4,3 x 4,5 mm2 odpov\u00EDd\u00E1 d\u00E9lce elektrody 400 mm a \u0161\u00ED\u0159ce mezery 200 \u00B5m. Izola\u010Dn\u00ED odpor mezi elektrodami je \u0159\u00E1du M\u2126. Na kontakty jsou p\u0159iva\u0159eny Ag p\u0159\u00EDvody o \u00D8 0,25 mm. Pracovn\u00ED teploty -30 \u00B0C a\u017E +200 \u00B0C. TB-KBI2C -Na Al2O3 substr\u00E1tu 7,5 mm x 5,6 mm jsou oboustrann\u011B vytvo\u0159eny Pt motivy. Na l\u00EDcov\u00E9 stran\u011B je interdigit\u00E1ln\u00ED elektroda s mezerou 200 \u00B5m a na rubov\u00E9 vyh\u0159\u00EDvac\u00ED element a odporov\u00E1 dr\u00E1ha \u0161\u00ED\u0159ky 30 \u00B5m laserov\u011B nastaven\u00E1 na 1000 \u2126 s TKR 3850 ppm/K a je chr\u00E1n\u011Bna skelnou vrstvou. Kombinovan\u00FD syst\u00E9m je opat\u0159en v\u00FDvody typu SIL. Pracovn\u00ED teploty je -30 \u00B0C a\u017E +200 \u00B0C. V\u00FDsledku bylo dosa\u017Eeno ve druh\u00E9m roce \u0159e\u0161en\u00ED projektu. U\u017Eivatelem v\u00FDsledku projektu bude TESLA BLATN\u00C1, a.s. Smlouva o vyu\u017Eit\u00ED v\u00FDsledku s poskytovatelem TA \u010CR bude uzav\u0159en\u00E1 v z\u00E1konn\u00E9 lh\u016Ft\u011B. statut\u00E1rn\u00ED z\u00E1stupce - Jan Kalous, tel.\u010D.: 383 415 210, \u0159e\u0161itel projektu: Ing. Pavol Oza\u0148\u00E1k, tel.\u010D.: 383415366" . "V\u00FDsledek Senzorov\u00E9 struktury- ov\u011B\u0159en\u00E1 technologie umo\u017En\u00ED zv\u00FD\u0161en\u00ED ro\u010Dn\u00EDho objemu v\u00FDroby senzor\u016F o 22%, zv\u00FD\u0161en\u00ED zisku z v\u00FDroby senzor\u016F o 15%. P\u0159i vyu\u017E\u00EDv\u00E1n\u00ED t\u00E9to ov\u011B\u0159en\u00E9 technologie dojde k \u00FAspo\u0159e v\u00FDrobn\u00EDch n\u00E1klad\u016F p\u0159i v\u00FDrob\u011B senzor\u016F BI2C a KBI2C oproti st\u00E1vaj\u00EDc\u00ED technologii o 18 %." . "Mergl, Martin" . . "Byly navr\u017Eeny a realizov\u00E1ny plan\u00E1rn\u00ED senzorov\u00E9 struktury pro m\u011B\u0159en\u00ED elektrick\u00FDch vlastnost\u00ED vrstev z uhl\u00EDkov\u00FDch nanostruktur: 1. Interdigit\u00E1ln\u00ED elektrodov\u00FD syst\u00E9m s \u0161\u00ED\u0159kou mezery 20 a\u017E 500 \u03BCm z tenk\u00E9 vrstvy platiny nebo zlata, s v\u00FDvody, kter\u00E9 odol\u00E1vaj\u00ED teplot\u00E1m nan\u00E1\u0161en\u00ED vrstev, m\u011B\u0159en\u00ED a odply\u0148ov\u00E1n\u00ED p\u0159i \u010Dinnosti senzor\u016F plyn\u016F. 2. Kombinovan\u00FD senzor zahrnuj\u00EDc\u00ED interdigit\u00E1ln\u00ED elektrodov\u00FD syst\u00E9m, senzor teploty a topn\u00FD \u010Dl\u00E1nek. Byla navr\u017Eena technologie v\u00FDroby t\u011Bchto struktur v \u010Dist\u00FDch prostorech a prakticky ov\u011B\u0159ena za vyu\u017Eit\u00ED magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED vrstev Pt nebo NiCr/Ni/Au, oboustrann\u00E9 fotolitografie za vyu\u017Eit\u00ED techniky lift-off, tepeln\u00E9ho zpracov\u00E1n\u00ED, trimov\u00E1n\u00ED odporu senzoru teploty laserem, s\u00EDtotisku kryc\u00EDch past, \u0159ez\u00E1n\u00ED diamantovou pilou a p\u0159ipojen\u00EDm v\u00FDvod\u016F typu SIL. Hotov\u00E9 v\u00FDrobky jsou podrobeny \u0159ad\u011B m\u011B\u0159en\u00ED a test\u016F v\u010Detn\u011B funk\u010Dn\u00EDch." . . "[C7D132B24E48]" . . . . . . . . "Byly navr\u017Eeny a realizov\u00E1ny plan\u00E1rn\u00ED senzorov\u00E9 struktury pro m\u011B\u0159en\u00ED elektrick\u00FDch vlastnost\u00ED vrstev z uhl\u00EDkov\u00FDch nanostruktur: 1. Interdigit\u00E1ln\u00ED elektrodov\u00FD syst\u00E9m s \u0161\u00ED\u0159kou mezery 20 a\u017E 500 \u03BCm z tenk\u00E9 vrstvy platiny nebo zlata, s v\u00FDvody, kter\u00E9 odol\u00E1vaj\u00ED teplot\u00E1m nan\u00E1\u0161en\u00ED vrstev, m\u011B\u0159en\u00ED a odply\u0148ov\u00E1n\u00ED p\u0159i \u010Dinnosti senzor\u016F plyn\u016F. 2. Kombinovan\u00FD senzor zahrnuj\u00EDc\u00ED interdigit\u00E1ln\u00ED elektrodov\u00FD syst\u00E9m, senzor teploty a topn\u00FD \u010Dl\u00E1nek. Byla navr\u017Eena technologie v\u00FDroby t\u011Bchto struktur v \u010Dist\u00FDch prostorech a prakticky ov\u011B\u0159ena za vyu\u017Eit\u00ED magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED vrstev Pt nebo NiCr/Ni/Au, oboustrann\u00E9 fotolitografie za vyu\u017Eit\u00ED techniky lift-off, tepeln\u00E9ho zpracov\u00E1n\u00ED, trimov\u00E1n\u00ED odporu senzoru teploty laserem, s\u00EDtotisku kryc\u00EDch past, \u0159ez\u00E1n\u00ED diamantovou pilou a p\u0159ipojen\u00EDm v\u00FDvod\u016F typu SIL. Hotov\u00E9 v\u00FDrobky jsou podrobeny \u0159ad\u011B m\u011B\u0159en\u00ED a test\u016F v\u010Detn\u011B funk\u010Dn\u00EDch."@cs . "RIV/00375306:_____/14:#0000009!RIV15-TA0-00375306" . . "Proven technology - sensor structures"@en . . "35414" . "Bariov\u00E1, Marie" . "Bodn\u00E1r, Michal" . "RIV/00375306:_____/14:#0000009" . "Moravec, Vlast\u00EDk" . . . . "Dlaba\u010Dov\u00E1, Miloslava" . . "Ov\u011B\u0159en\u00E1 technologie - senzorov\u00E9 struktury" . . . "Blecha, Tom\u00E1\u0161" . . . "Senzorov\u00E9 struktury BI2C a KBI2C" . "P(TA03010037)" .