"Kr\u010Dma, Franti\u0161ek" . "1213-2705" . "[64F7A252C4EA]" . "P\u0159\u00EDsp\u011Bvek pod\u00E1v\u00E1 z\u00E1kladn\u00ED p\u0159ehled metod optick\u00E9 spektroskopie u\u017E\u00EDvyn\u00FDch v diagnostice n\u00EDzkotlak\u00E9ho plazmatu. Na z\u00E1klad\u011B poznatk\u016F z kvantov\u00E9 mechaniky je pod\u00E1n p\u0159ehled postup\u016F v\u00FDpo\u010Dtu elektronov\u00E9, vibra\u010Dn\u00ED a rota\u010Dn\u00ED teploty ze spektra. Je tak\u00E9 zahrnut v\u00FDpo\u010Det koncentrace elektron\u016F. Na p\u0159\u00EDkladu nehomogenn\u00EDho plazmatu je uk\u00E1z\u00E1n proncip Abelovy transformace. Posledn\u00ED \u010D\u00E1st pak pod\u00E1v\u00E1 stru\u010Dn\u00FD p\u0159ehled absorp\u010Dn\u00EDch spektroskopick\u00FDch metod s ohledem na jejich vyu\u017Eitelnost v diagnostice plazmatu." . . . "2" . "1"^^ . . . . "RIV/00216305:26310/05:PU51155" . . "13" . "CZ - \u010Cesk\u00E1 republika" . "1"^^ . . "Optick\u00E9 metody diagnostiky plazmatu pro depozice tenk\u00FDch vrstev za n\u00EDzk\u00E9ho tlaku" . . "26310" . "Optick\u00E9 metody diagnostiky plazmatu pro depozice tenk\u00FDch vrstev za n\u00EDzk\u00E9ho tlaku"@cs . "11"^^ . "The contribution is focused on the basic information about optical spectroscopy methods applied in the field of low-pressure plasma diagnostics. Tha basic quantum mechanics is given, too, and on this background the determination of electron, vibrational and rotational temperatures are given. The calculation of electron concentration from the spectra is also included. The principle of Abel transformation is shown on the example of non-homogeneous plasma object. The last part gives an overview through the absorption spectroscopy methods and their applicability in plasma diagnostics."@en . "N, V, Z(MSM 263100019)" . "optical emission spectroscopy, absorption spectroscopz, laser spectroscopy, spectrometer, Abel transformation"@en . . . . . "534734" . . "Optick\u00E9 metody diagnostiky plazmatu pro depozice tenk\u00FDch vrstev za n\u00EDzk\u00E9ho tlaku" . . "Optical Plasma Diagnostic Methods for the Low Pressure Depositions"@en . . "Zpravodaj \u010Cesk\u00E9 Vakuov\u00E9 Spole\u010Dnosti" . "RIV/00216305:26310/05:PU51155!RIV11-MSM-26310___" . "Optick\u00E9 metody diagnostiky plazmatu pro depozice tenk\u00FDch vrstev za n\u00EDzk\u00E9ho tlaku"@cs . . . "Optical Plasma Diagnostic Methods for the Low Pressure Depositions"@en . "P\u0159\u00EDsp\u011Bvek pod\u00E1v\u00E1 z\u00E1kladn\u00ED p\u0159ehled metod optick\u00E9 spektroskopie u\u017E\u00EDvyn\u00FDch v diagnostice n\u00EDzkotlak\u00E9ho plazmatu. Na z\u00E1klad\u011B poznatk\u016F z kvantov\u00E9 mechaniky je pod\u00E1n p\u0159ehled postup\u016F v\u00FDpo\u010Dtu elektronov\u00E9, vibra\u010Dn\u00ED a rota\u010Dn\u00ED teploty ze spektra. Je tak\u00E9 zahrnut v\u00FDpo\u010Det koncentrace elektron\u016F. Na p\u0159\u00EDkladu nehomogenn\u00EDho plazmatu je uk\u00E1z\u00E1n proncip Abelovy transformace. Posledn\u00ED \u010D\u00E1st pak pod\u00E1v\u00E1 stru\u010Dn\u00FD p\u0159ehled absorp\u010Dn\u00EDch spektroskopick\u00FDch metod s ohledem na jejich vyu\u017Eitelnost v diagnostice plazmatu."@cs . . .