"RIV/00216305:26310/03:PU38788!RIV06-GA0-26310___" . "Mechanick\u00E9 vlastnosti plazmov\u00E9ho polymeru p\u0159ipraven\u00E9ho v pulzn\u00EDm plazmatu z vinyltrietoxysilanu"@cs . . . . "Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.." . "Department of chemistry, University of Bari" . "\u010Cech, Vladim\u00EDr" . . "VTEO, pulsed plasma, vinyltriethoxysilane, Young modulus"@en . "2"^^ . "Van\u011Bk, Jan" . "Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane" . "4"^^ . "Plasma-polymerized thin films of vinyltriethoxysilane have been prepared by plasma-enhanced chemical vapor deposition using an RF (13.56 MHz) helical coupling pulsed-plasma system. Thin films of the thickness ranging from 80 nm to 1.5 um were subjected to nanoindentation measurements. The Youngs modulus determined from the indentation load-displacement curve has increased with the effective power used from 4 GPa to 11 GPa. Thin films have exhibited an abrupt increase of the hardness at the film surface.."@en . . "Byly sledov\u00E1ny a ovliv\u0148ov\u00E1ny mechanick\u00E9 vlastnosti plazmov\u00E9ho polymeru p\u0159ipraven\u00E9ho v pulzn\u00EDm plazmatu z vinyltrietoxysilanu"@cs . "P(GA104/00/0708), P(OC 527.110)" . . "2003-06-21+02:00"^^ . "16th International Symposium on Plasma Chemistry" . "Taormina" . "Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane" . . . "461-466" . "6"^^ . . . . "Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane"@en . "Goruppa, Alexander" . "26310" . . "Mechanick\u00E9 vlastnosti plazmov\u00E9ho polymeru p\u0159ipraven\u00E9ho v pulzn\u00EDm plazmatu z vinyltrietoxysilanu"@cs . . "Mechanical properties of pulsed-plasma polymerized vinyltriethoxysilane"@en . . "[789CA736405D]" . "Jones, Frank" . "Bari" . "614666" . . "RIV/00216305:26310/03:PU38788" . . . . .