"0"^^ . . "Spectroscopic Observation of Plasma Deposition of Thin Silane and Siloxane Based Films" . . . . "2"^^ . . "P\u0159ikryl, Radek" . "Spectroscopic Observation of Plasma Deposition of Thin Silane and Siloxane Based Films"@en . . . "\u010Cech, Vladim\u00EDr" . "Spectroscopic Observation of Plasma Deposition of Thin Silane and Siloxane Based Films" . "\u0160ormov\u00E1, Hana" . "The spectroscopic studies have been focused on the basic characterization of the RF discharge conditions during the films deposition. In the discharge spectra many different species has been determined. To characterize the neutral gas temperature the small amount of nitrogen has been involved into the discharge. The dependencies of the temperature and the molecular excitations in the discharge have been initially studied on the total discharge power and gas composition. The correlation among the discharrge parameters and the final layer properties will be subject of the following studies." . "Proceedings of 14th Symposium on Application of Plasma Processes" . . . "Spectroscopic Observation of Plasma Deposition of Thin Silane and Siloxane Based Films"@en . "628166" . "RIV/00216305:26310/03:PU38240!RIV/2004/MSM/263104/N" . "The spectroscopic studies have been focused on the basic characterization of the RF discharge conditions during the films deposition. In the discharge spectra many different species has been determined. To characterize the neutral gas temperature the small amount of nitrogen has been involved into the discharge. The dependencies of the temperature and the molecular excitations in the discharge have been initially studied on the total discharge power and gas composition. The correlation among the discharrge parameters and the final layer properties will be subject of the following studies."@en . . . . . "2003-01-13+01:00"^^ . "Bobrovn\u00EDk" . "[535AD4DE9573]" . "Z(MSM 263100019)" . "7"^^ . "Van\u011Bk, Jan" . "Bratislava" . "80-8040-195-0" . "RIV/00216305:26310/03:PU38240" . "26310" . "Kr\u010Dma, Franti\u0161ek" . . "7"^^ . . "Slovensk\u00E1 akad\u00E9mia vied" . . . "Ra\u0161kov\u00E1, Zuzana" . . . "Plasma deposition, organosilikone layers, optical emission spectroscopy"@en . . "222-223" . . "Havelkov\u00E1, Iveta" . . "0"^^ .