"Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films"@en . . "Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films" . "401-405" . "5" . . "Z(MSM 263100019)" . "The spectroscopic studies have been focused on the basic characterization of the RF discharge conditions during the films deposition. In the discharge spectra many different species has been determined. To characterize the neutral gas temperature the small amount of nitrogen has been involved into the discharge. The dependencies of the temperature and the molecular excitations in the discharge have been initially studied on the total discharge power and gas composition. The correlation among the discharrge parameters and the final layer properties will be subject of the following studies." . "53" . . "0323-0465" . "Van\u011Bk, Jan" . "Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films"@en . "0"^^ . "0"^^ . . "7"^^ . "Kr\u010Dma, Franti\u0161ek" . . . "\u010Cech, Vladim\u00EDr" . "The spectroscopic studies have been focused on the basic characterization of the RF discharge conditions during the films deposition. In the discharge spectra many different species has been determined. To characterize the neutral gas temperature the small amount of nitrogen has been involved into the discharge. The dependencies of the temperature and the molecular excitations in the discharge have been initially studied on the total discharge power and gas composition. The correlation among the discharrge parameters and the final layer properties will be subject of the following studies."@en . . . . "Ra\u0161kov\u00E1, Zuzana" . "[974BA1EF69C5]" . "5"^^ . "RIV/00216305:26310/03:PU38239!RIV/2004/MSM/263104/N" . "Acta Physica Slovaca" . "7"^^ . . . "SK - Slovensk\u00E1 republika" . . . "26310" . . . . . "P\u0159ikryl, Radek" . "Havelkov\u00E1, Iveta" . . "Plasma deposition, organosilicone layers, optical emission spectroscopy"@en . "Spectroscopic Monitoring of Plasma Deposition of Silane and Siloxane Based Thin Films" . . . "RIV/00216305:26310/03:PU38239" . . "628163" . "\u0160ormov\u00E1, Hana" .