. "147503" . "RIV/00216305:26220/12:PU99549" . "M\u00E1rik, Marian" . . "Low power MEMS heating membrane"@en . "6"^^ . "Brno" . "Brno" . "[596A0F837729]" . . "6"^^ . "P(ED1.1.00/02.0068), P(EE2.3.20.0027)" . . . . . "Low power MEMS heating membrane" . . . . "This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate."@en . . "Pek\u00E1rek, Jan" . "This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate." . . "Low power MEMS heating membrane"@en . "26220" . . "4"^^ . "EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS" . . . . "Low power MEMS heating membrane" . "RIV/00216305:26220/12:PU99549!RIV13-MSM-26220___" . . "M\u00E1rik, Marian" . "2012-06-28+02:00"^^ . . "MEMS (microelectromechanical system), micro-hotplate, power consumption, micromachining."@en . . "Svato\u0161, Vojt\u011Bch" . "Chomouck\u00E1, Jana" . . "Vysok\u00E9 u\u010Den\u00ED technick\u00E9 v Brn\u011B" . "978-80-214-4539-0" . . "Hrd\u00FD, Radim" . . "Hub\u00E1lek, Jarom\u00EDr" . .