. "3"^^ . . "3"^^ . . "RIV/00216305:26220/10:PU90231" . "Mikrosyn. Nov\u00E9 trendy v mikroelektonick\u00FDch syst\u00E9mech a nanotechnologi\u00EDch" . "Vrba, Radim\u00EDr" . . "978-80-214-4229-0" . "Brno" . . "Brno" . "The article deals with a novel laboratory anodic bonding device. This device is used for MEMS creation. The anodic bonding is a method for joining glass with silicon. It is one of the important steps of MEMS components packaging. The bonding mechanism joins the glass and silicon by heating them above 400 degrees of C and by applying an external DC electric field in a range from 500 to 1000 V. The bonded region can be seen easily through the glass because it changes the color to gray. The measured bonding strength is over 15 MPa and the cracks occur on the glass, i.e. the bonding strength is over the mechanical strength of the glass."@en . "2010-12-14+01:00"^^ . . "Laboratorn\u00ED za\u0159\u00EDzen\u00ED pro anodick\u00E9 p\u00E1jen\u00ED" . "\u010Cl\u00E1nek pojedn\u00E1v\u00E1 o nov\u00E9m laboratorn\u00EDm za\u0159\u00EDzen\u00ED, kter\u00E9 je zalo\u017Eeno na technologii anodick\u00E9ho p\u00E1jen\u00ED. Za\u0159\u00EDzen\u00ED slou\u017E\u00ED k v\u00FDrob\u011B MEMS sou\u010D\u00E1stek."@cs . . . . "Pek\u00E1rek, Jan" . "Laboratorn\u00ED za\u0159\u00EDzen\u00ED pro anodick\u00E9 p\u00E1jen\u00ED"@cs . "\u010Cl\u00E1nek pojedn\u00E1v\u00E1 o nov\u00E9m laboratorn\u00EDm za\u0159\u00EDzen\u00ED, kter\u00E9 je zalo\u017Eeno na technologii anodick\u00E9ho p\u00E1jen\u00ED. Za\u0159\u00EDzen\u00ED slou\u017E\u00ED k v\u00FDrob\u011B MEMS sou\u010D\u00E1stek." . . . "4"^^ . "NOVPRESS Brno" . "[58B345D1EBDD]" . . "A Novel Laboratory Anodic Bonding Device"@en . . . "H\u00E1ze, Ji\u0159\u00ED" . "26220" . "Laboratorn\u00ED za\u0159\u00EDzen\u00ED pro anodick\u00E9 p\u00E1jen\u00ED"@cs . . . "RIV/00216305:26220/10:PU90231!RIV11-GA0-26220___" . "Laboratorn\u00ED za\u0159\u00EDzen\u00ED pro anodick\u00E9 p\u00E1jen\u00ED" . "anodic bonding, MEMS"@en . "P(2A-1TP1/143), P(GA102/09/1601), Z(MSM0021630503)" . . . . . "267763" . "A Novel Laboratory Anodic Bonding Device"@en .