"Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells"@en . . "Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells"@en . "Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells" . . . . "3"^^ . "EDS 09 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS" . "352193" . . "1"^^ . . "H\u00E9gr, Ond\u0159ej" . "[CE10F0949762]" . . . . "yttrium oxide, magnetron sputtering, antireflection coating, optical properties"@en . "This paper deals with structural and optical properties of sputtered thin yttrium-oxide layers. Yttrium oxide is one of the materials which can be used as the antireflection coating for silicon solar cells. Its advantages are mainly a good thermal stability and a suitable refraction index. The yttrium oxide layers were deposited by means of RF magnetron sputtering system in non-reactive mode from yttrium-oxide target. A main aim was focused on evaluation of deposited layers by using UV-VIS spectrophotometry."@en . "26220" . . . "Brno" . . "This paper deals with structural and optical properties of sputtered thin yttrium-oxide layers. Yttrium oxide is one of the materials which can be used as the antireflection coating for silicon solar cells. Its advantages are mainly a good thermal stability and a suitable refraction index. The yttrium oxide layers were deposited by means of RF magnetron sputtering system in non-reactive mode from yttrium-oxide target. A main aim was focused on evaluation of deposited layers by using UV-VIS spectrophotometry." . "Brno" . . . "Yttrium Oxide Layers for Antireflection Coating of Silicon Solar Cells" . "4"^^ . "RIV/00216305:26220/09:PU81713" . . "NOVPRESS s.r.o." . "RIV/00216305:26220/09:PU81713!RIV10-MSM-26220___" . "Z(MSM0021630503)" . "978-80-214-3933-7" . "2009-09-02+02:00"^^ . . .