. . "Jir\u00E1k, Josef" . "340232" . "P\u0159\u00EDtomnost vysok\u00E9ho tlaku plyn\u016F (a\u017E 2000Pa) v komo\u0159e vzorku environment\u00E1ln\u00EDho rastrovac\u00EDho elektronov\u00E9ho mikroskopu vytv\u00E1\u0159\u00ED specifick\u00E9 n\u00E1roky na konstrukci mikroskopu a jeho \u010Derpac\u00ED syst\u00E9m. Jednotliv\u00E9 konstruk\u010Dn\u00ED \u010D\u00E1sti EREM, zejm\u00E9na samostatn\u011B \u010Derpan\u00E1 komora mezi tubusem a komorou vzorku mikroskopu, mus\u00ED b\u00FDt navr\u017Eeny tak, aby vyhov\u011Bly n\u00E1ro\u010Dn\u00FDm po\u017Eadavk\u016Fm na \u00FA\u010Dinn\u00E9 \u010Derp\u00E1n\u00ED jejich vnit\u0159n\u00EDho prostoru a minimalizaci tlaku v n\u011Bm. Relativn\u00ED technologick\u00E1 n\u00E1ro\u010Dnost tohoto mikroskopu je v\u0161ak v\u00EDce ne\u017E kompenzov\u00E1na \u0161irokou \u0161k\u00E1lou mo\u017Enost\u00ED jeho vyu\u017Eit\u00ED a to a\u0165 ji\u017E v m\u00F3du vakua, nebo v m\u00F3du vysok\u00E9ho tlaku. Zna\u010Dnou tlakovou diferenci, vznikaj\u00EDc\u00ED mezi komorou vzorku (3-1000Pa) a prostorem zdroje elektron\u016F (0.001 - 10-9Pa, podle typu katody) VP-SEM, lze udr\u017Eet d\u00EDky syst\u00E9mu diferenci\u00E1ln\u011B \u010Derpan\u00FDch komor, tlak omezuj\u00EDc\u00EDch clon (PLA1 a PLA2) a \u00FA\u010Dinn\u00E9mu syst\u00E9mu \u010Derp\u00E1n\u00ED plynu. Clony jsou opat\u0159eny otvory s pr\u016Fm\u011Brem \u0159\u00E1dov\u011B des\u00EDtek a"@cs . "Funkcni vzorek je vyuzivan na pracovisti resitele - \u00DAstav P\u0159\u00EDstrojov\u00E9 techniky AV \u010CR; Kr\u00E1lovopolsk\u00E1 147; 612 64 Brno - Laborato\u0159 LEM Vakuov\u011B \u010Derpan\u00E1 komora s tlakem do cca 30 Pa umo\u017E\u0148uj\u00EDc\u00ED odd\u011Blit prostory s velmi rozd\u00EDln\u00FDmi hodnotami t" . . . . . . "3"^^ . "[7E584E7D0027]" . . "P\u0159\u00EDtomnost vysok\u00E9ho tlaku plyn\u016F (a\u017E 2000Pa) v komo\u0159e vzorku environment\u00E1ln\u00EDho rastrovac\u00EDho elektronov\u00E9ho mikroskopu vytv\u00E1\u0159\u00ED specifick\u00E9 n\u00E1roky na konstrukci mikroskopu a jeho \u010Derpac\u00ED syst\u00E9m. Jednotliv\u00E9 konstruk\u010Dn\u00ED \u010D\u00E1sti EREM, zejm\u00E9na samostatn\u011B \u010Derpan\u00E1 komora mezi tubusem a komorou vzorku mikroskopu, mus\u00ED b\u00FDt navr\u017Eeny tak, aby vyhov\u011Bly n\u00E1ro\u010Dn\u00FDm po\u017Eadavk\u016Fm na \u00FA\u010Dinn\u00E9 \u010Derp\u00E1n\u00ED jejich vnit\u0159n\u00EDho prostoru a minimalizaci tlaku v n\u011Bm. Relativn\u00ED technologick\u00E1 n\u00E1ro\u010Dnost tohoto mikroskopu je v\u0161ak v\u00EDce ne\u017E kompenzov\u00E1na \u0161irokou \u0161k\u00E1lou mo\u017Enost\u00ED jeho vyu\u017Eit\u00ED a to a\u0165 ji\u017E v m\u00F3du vakua, nebo v m\u00F3du vysok\u00E9ho tlaku. Zna\u010Dnou tlakovou diferenci, vznikaj\u00EDc\u00ED mezi komorou vzorku (3-1000Pa) a prostorem zdroje elektron\u016F (0.001 - 10-9Pa, podle typu katody) VP-SEM, lze udr\u017Eet d\u00EDky syst\u00E9mu diferenci\u00E1ln\u011B \u010Derpan\u00FDch komor, tlak omezuj\u00EDc\u00EDch clon (PLA1 a PLA2) a \u00FA\u010Dinn\u00E9mu syst\u00E9mu \u010Derp\u00E1n\u00ED plynu. Clony jsou opat\u0159eny otvory s pr\u016Fm\u011Brem \u0159\u00E1dov\u011B des\u00EDtek a" . "High pressure of gases (up to 2000 Pa) in the specimen chamber of the environmental scanning electron microscope leads to specific construction requirements for the microscope and its pumping system. Construction parts of the microscope, especially separately pumped chamber between the optical column and the specimen chamber, must be designed in such a way so that they meet the requirements on efficient evaporation and pressure minimization in this chamber."@en . . "Ned\u011Bla, Vil\u00E9m" . . . . "\u00DAstav P\u0159\u00EDstrojov\u00E9 techniky AV \u010CR; Kr\u00E1lovopolsk\u00E1 147; 612 64 Brno" . "3"^^ . . "Differentially evacuated chamber of the vacuum system of ESEM"@en . . "Samostatn\u011B \u010Derpan\u00E1 komora vakuov\u00E9ho syst\u00E9mu environment\u00E1ln\u00EDho rastrovac\u00EDho elektronov\u00E9ho mikroskopu"@cs . "26220" . "Samostatn\u011B \u010Derpan\u00E1 komora vakuov\u00E9ho syst\u00E9mu environment\u00E1ln\u00EDho rastrovac\u00EDho elektronov\u00E9ho mikroskopu" . "v\u00FDzkum" . "Samostatn\u011B \u010Derpan\u00E1 komora vakuov\u00E9ho syst\u00E9mu environment\u00E1ln\u00EDho rastrovac\u00EDho elektronov\u00E9ho mikroskopu"@cs . . "Maxa, Ji\u0159\u00ED" . . "RIV/00216305:26220/09:PR24217!RIV10-MSM-26220___" . "Samostatn\u011B \u010Derpan\u00E1 komora vakuov\u00E9ho syst\u00E9mu environment\u00E1ln\u00EDho rastrovac\u00EDho elektronov\u00E9ho mikroskopu" . "RIV/00216305:26220/09:PR24217" . . . "Differentially evacuated chamber of the vacuum system of ESEM"@en . . "Z(MSM0021630516)" . "D\u010CK" . "Differentialy pumped chamber of ESEM, electron microscopy"@en .