"558781" . "2"^^ . . . "\u010Cl\u00E1nek se zab\u00FDv\u00E1 \u0159\u00EDd\u00EDc\u00ED jednotkou pro v\u00FDrobu katod pou\u017Eivan\u00FDch v elektronov\u00E9m litografu. Pro tento v\u00FDrobn\u00ED proces bylo vytvo\u0159eno nov\u00FD elektronick\u00FD syst\u00E9m pro \u0159\u00EDzen\u00ED tohoto v\u00FDrobn\u00EDho procesu. \u010Cl\u00E1nek se zab\u00FDv\u00E1 popisem tohoto za\u0159\u00EDzen\u00ED, jeho mo\u017Enostmi a v\u00FDsledn\u00E9m efektu na v\u00FDrobn\u00ED proces."@cs . "Kadlec, Jaroslav" . . . "RIV/00216305:26220/04:PU44819" . . "EDS 04 - Proceedings" . "2"^^ . . "\u0158\u00EDd\u00EDc\u00ED jednotka pro lept\u00E1n\u00ED katod"@cs . "256-259" . . . "4"^^ . "Kola\u0159\u00EDk, Vladim\u00EDr" . . "2004-09-09+02:00"^^ . . "Z(MSM 262200022)" . . "\u0158\u00EDd\u00EDc\u00ED jednotka pro lept\u00E1n\u00ED katod"@cs . "[00B33FCBF67A]" . "Vysok\u00E9 u\u010Den\u00ED technick\u00E9 v Brn\u011B" . "Brno" . "Control unit for etching of cathodes"@en . "Brno" . . "Control unit for etching of cathodes"@en . "This paper covers control board for cathode etching. This device is designed in order to analyze and control optimal cathoed etching cycle. Main function of this control board is control position system, measure etching current and control cathode etching cycle."@en . "control board, etching, cathode"@en . . "Control unit for etching of cathodes" . "Control unit for etching of cathodes" . "This paper covers control board for cathode etching. This device is designed in order to analyze and control optimal cathoed etching cycle. Main function of this control board is control position system, measure etching current and control cathode etching cycle." . "RIV/00216305:26220/04:PU44819!RIV/2005/MSM/262205/N" . . "26220" . . "80-214-2701-9" . . .