. "YAG II scintil\u00E1tor pro zobrazov\u00E1n\u00ED s vysok\u00FDm rozli\u0161en\u00EDm v SEM"@cs . . . "YAG II scintil\u00E1tor pro zobrazov\u00E1n\u00ED s vysok\u00FDm rozli\u0161en\u00EDm v SEM"@cs . "[C79CD3FCFF68]" . . "Schauer, Petr" . . . "Detection of backscattered electrons (BSE) in scanning electron microscopy (SEM) serves as an auxiliary method in the study of surfaces and composition of materials. BSE have properties that are different from those of usually used secondary electrons (SE). The achievement of the theoretical limit of resolution (0,6 - 0,8 nm for SE and 0,9 nm for BSE) depends not only on the properties of electron source, properties of electron optics, specimen preparation technique, type of electrons, but also on the ddetection system efficiency." . "New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM"@en . . "RIV/00216305:26220/04:PU44586!RIV/2005/AV0/262205/N" . "Detekce zp\u011Btn\u011Bodra\u017Een\u00FDch elektron\u016F (BSE)v SEM je exaktn\u00ED metoda pro studium povrch\u016F a slo\u017Een\u00ED materi\u00E1l\u016F. BSE maj\u00ED vlastnosti, kter\u00E9 jsou odli\u0161n\u00E9 od t\u011Bch je\u017E maj\u00ED b\u011B\u017En\u011B pou\u017E\u00EDvan\u00E9 sekund\u00E1rn\u00ED elektrony (SE). Teoretick\u00FD limit rozli\u0161en\u00ED (0,6-0,8 nm pro SE a 0,9 nm pro BSE) nejenom na vlastnostech elektronov\u00E9ho zdroje, elektronov\u00E9 optiky, technice p\u0159\u00EDpravy vzorku, typu elektron\u016F, ale tak\u00E9 na \u00FA\u010Dinnosti detek\u010Dn\u00EDho syst\u00E9mu."@cs . . . "Detection of backscattered electrons (BSE) in scanning electron microscopy (SEM) serves as an auxiliary method in the study of surfaces and composition of materials. BSE have properties that are different from those of usually used secondary electrons (SE). The achievement of the theoretical limit of resolution (0,6 - 0,8 nm for SE and 0,9 nm for BSE) depends not only on the properties of electron source, properties of electron optics, specimen preparation technique, type of electrons, but also on the ddetection system efficiency."@en . "11-12" . "Skalsk\u00FD Dv\u016Fr" . "2"^^ . "New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM" . . "P(IBS2065107)" . "RIV/00216305:26220/04:PU44586" . . "New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM"@en . "\u00DAstav p\u0159\u00EDstrojov\u00E9 techniky AV \u010CR" . "scanning electron microscopy, YAG scintillator, backscattered electrons"@en . . . "Wandrol, Petr" . "Autrata, Rudolf" . . . . "26220" . "576205" . "80-239-3246-2" . "2"^^ . "3"^^ . . "New Type of YAG-II Scintillator for Nanoresolution BSE Imaging in SEM" . "2004-07-12+02:00"^^ . "Brno" . "Recent Trends in Charged Particle Optics and Surface Physics Instrumentation" .