. "Nonlitographic Nanostructured Film Fabrication" . "3rd European Microelectrinics and Packaging Symposium" . "IMAPS CZ&SK chapter" . . "Nelitorgrafick\u00E9 vytv\u00E1\u0159en\u00ED nanostrukturovan\u00FDch vrstev"@cs . . . . . . "Nonlitographic Nanostructured Film Fabrication"@en . . "RIV/00216305:26220/04:PU44208" . "[82BA19166BAE]" . . "P(GP102/04/P162), Z(MSM 262200022)" . . "The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM)."@en . . "6"^^ . "Nanomechanizuj\u00EDc\u00ED techniky v oblasti tenk\u00FDch vrstev jsou zde pops\u00E1ny. Prezentovan\u00E9 techniky ukazuj\u00ED mo\u017Enost vytv\u00E1\u0159en\u00ED nanostruktur bez pou\u017Eit\u00ED elektronov\u00E9 litografu s vysok\u00FDm rozli\u0161en\u00EDm. Anodizovan\u00E1 keramika byla pou\u017Eita jako maska pro vytvo\u0159en\u00ED nanoty\u010Dinek. Vytvo\u0159ene\u00E9 struktury byly nanlyzov\u00E1ny pomoc\u00ED SEM."@cs . . "576403" . . "2004-06-16+02:00"^^ . . "1"^^ . . "Nonlitographic Nanostructured Film Fabrication" . . "Lan\u0161kroun" . . "1"^^ . "Prague" . . "Nonlitographic Nanostructured Film Fabrication"@en . "The nanomachining techniques in the field of thin films are described. The presented techniques make possible fabrication of nanostructures without utilization of high-resolution electron-beam lithography. Self-ordering of aluminium during anodization is employed in nanomachining. Nanomachinig is presented as a low cost technology for microelectronic industry. Results of nanoporous ceramic fabrication focused on the importance of electropolishing for obtaining the requested sizes of a nanostructure. A method of preparation of the nanomachined ceramic used as a template is discussed. The nanorods (nanowires) were created. Nanostructures were scanned by the electron-beam microscope (SEM)." . "Nelitorgrafick\u00E9 vytv\u00E1\u0159en\u00ED nanostrukturovan\u00FDch vrstev"@cs . "80-239-2835-X" . "RIV/00216305:26220/04:PU44208!RIV06-GA0-26220___" . "Hub\u00E1lek, Jarom\u00EDr" . . "495-500" . "Self-ordering, nanopores, nanorods, nanowires"@en . "26220" .