"near-field optics, scanning, microscopy, semiconductor, optical characterization, optical properties,"@en . . . "585519" . . . "RIV/00216305:26220/04:PU44150" . "Physics of low-dimensional structures" . "Tom\u00E1nek, Pavel" . "4"^^ . "2004" . "Dobis, Pavel" . . "Scanning near-field optical microscopy in semiconductor research"@en . . "Scanning near-field optical microscopy in semiconductor research" . "RIV/00216305:26220/04:PU44150!RIV14-MSM-26220___" . . "4"^^ . . . "26220" . "Bene\u0161ov\u00E1, Mark\u00E9ta" . "Scanning near-field optical microscopy in semiconductor research" . "0204-3467" . "1/2" . . "000224052700007" . . . . "Exploration of optical properties of materials and optical characterization of structure defects at the nanometer scale was impossible until recently due to the diffraction limit of light. With the invention of Scanning near-field optical microscopy (SNOM) the spatial resolution at the 50-100 nm level using visible or near infrared light is now possible.This review focuses on some applications of SNOM techniques of nondestructive, non-contact spectroscopic investigation of the structures.Throughout the review, weight is placed on how SNOM goes together with existing material characterization techniques, as well as how quantitative results can be obtained from SNOM measurements."@en . "RU - Rusk\u00E1 federace" . "Scanning near-field optical microscopy in semiconductor research"@en . "[20C160788BBD]" . . . "Exploration of optical properties of materials and optical characterization of structure defects at the nanometer scale was impossible until recently due to the diffraction limit of light. With the invention of Scanning near-field optical microscopy (SNOM) the spatial resolution at the 50-100 nm level using visible or near infrared light is now possible.This review focuses on some applications of SNOM techniques of nondestructive, non-contact spectroscopic investigation of the structures.Throughout the review, weight is placed on how SNOM goes together with existing material characterization techniques, as well as how quantitative results can be obtained from SNOM measurements." . . . . . . "7"^^ . "P(ME 544), P(OC 523.40), Z(MSM 262200022)" . . . . "Otev\u0159elov\u00E1, Dana" . .