"Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds" . "Hub\u00E1lek, Jarom\u00EDr" . "micro hot plate, sceenprinting, sputtering, SEM, XRD, EDX, ammonia sensor"@en . . . "Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds" . "0-9733840-0-X" . "Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds"@en . . "Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds"@cs . "3"^^ . "RIV/00216305:26220/03:PU38835!RIV06-MSM-26220___" . . . . "2"^^ . "The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX."@en . "Povoa de Varzim" . "1"^^ . "Book of tutorials and posters - Smart Sensors and MEMS, NATO Advanced Study Institute" . "RIV/00216305:26220/03:PU38835" . . "[AA27F30500AC]" . . . . "Malysz, Karel" . "The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX."@cs . "Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds"@en . "615409" . "26220" . "Povoa de Varzim, Portugalsko" . "The aim of this work is the development of micromachined metal oxide sensor arrays for environmental applications such as the selective detection of ammonia in the atmosphere. Sensitivity and selectivity studies to ammonia, benzene and ethanol vapours and their binary mixtures was investigated on pure tin and tungsten oxide micromachined gas sensors. It has been found that an excellent identification of the species is possible using a single sensor. Using an adapted screen-printing techniquue, sensitive layers of nanopowder tin dioxide and tungsten trioxide were deposited on silicon micromachined substrates. The morphology and composition of deposited films were investigated by SEM, XRD and EDX." . . . . . . "Z(MSM 262200022)" . . "2003-01-01+01:00"^^ . "Microhotplate sensor arrays based on sputtered and screen-printed metal oxide films for selective detection of volatile compounds"@cs . . . . "Ivanov, Peter" . "Neuveden" . "291-291" . . .