. "26220" . "2"^^ . "Correig, Xavier" . "RIV/00216305:26220/03:PU38706!RIV06-GA0-26220___" . . "626449" . . . . . . "Hub\u00E1lek, Jarom\u00EDr" . . "Ivanov, Peter" . . "Instituto de Microelectr\u00F3nika de Barcelona CNM-CSIC" . "Llobet, Eduard" . . . "Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors"@en . "[CF3EAEA15239]" . "Vilanova, Xavier" . "Malysz, Karel" . "Can\u00E9, Carlas" . "2003-02-12+01:00"^^ . . "84-607-6771-X" . "Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors"@cs . "Barcelona" . . "We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed."@cs . "RIV/00216305:26220/03:PU38706" . "Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors" . "Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors" . . "Gracia, I." . "We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed." . "4th Conference on Electronic Devices" . . . . . "P(GA102/00/0939), Z(MSM 262200022)" . "Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors"@en . "1"^^ . "We report on the deposition of screen-printed tin oxide films to fabricate micromachined gas sensors. While in drop-coated or screen-printed devices the deposition of the sensing layer is usually the last step of the process, here the screen-printing wasmade before the backside silicon etching. This procedure avoids damaging the sensor membrane during the active layer deposition, which results in a excellent yield. Results on the morphology and gas sensitivity of the sensors developed are shown and dis scussed."@en . . "9"^^ . . "145-145" . "Calella de la Costa, Barcelona, Spain" . "gas sensors, micro-hotplate, thick-film, thin-film"@en . "Brezmes, Jes\u00FAs" . "Screen-printed nano-grain tin oxide films for micro-hotplate gas sensors"@cs .