. . . . "RIV/00216305:26220/03:PU38696" . . . . "354-357" . . . "[B9E85207B996]" . . "gas sensors, r.f. sputtering, screen-printing, micromachined array, quantitative gas analysis"@en . "Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied."@en . "0"^^ . "0"^^ . "Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures"@en . "628351" . "4"^^ . "2003-09-09+02:00"^^ . . "Z(MSM 262200022)" . "2"^^ . "10th Electronic devices and Systems Conference 2003" . . . "80-214-2452-4" . "RIV/00216305:26220/03:PU38696!RIV/2004/MSM/262204/N" . "Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures" . . "Hub\u00E1lek, Jarom\u00EDr" . . "Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures" . . "Sputtered and screen-printed metal oxide-based integrated microsensor arrays for the quantitative analysis of gas mixtures"@en . "Ing. Zden\u011Bk Novotn\u00FD CSc." . "5"^^ . "Malysz, Karel" . . "Either by screen-printing or sputtering, sensitive layers of nanoparticle tin oxide were deposited on silicon micromachined substrates. The procedures allow the deposition of sensing layers before membranes have been etched, which leads to gas micro-sensors with an exellent fabrication yield. The sensors response to ethanol, acetone and ammonia vapours and their binary mixtures was studied." . . "Brno" . "Brno" . "26220" . .