"Mechanical properties of Al thin film measured by microcompression" . . "Applied mechanics 2011" . . "[FADA34080824]" . . . "S" . . "2011-04-18+02:00"^^ . "Velk\u00E9 B\u00EDlovice" . "Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely." . "978-80-87434-03-1" . . "Mechanical properties of Al thin film measured by microcompression" . . . "RIV/00216305:26210/11:PU95284!RIV12-MSM-26210___" . "Two modern experimental techniques, the focused ion beam milling and the nanoindentation, were applied in order to measure exactly plastic properties of a Al-1.5%Cu thin film prepared by the physical vapour deposition, used for electrical connection of integrated circuits. By focused ion beam milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 micrometers) and their diameter was about 1.3 micrometers. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. It is possible to obtain stress-strain curves of the thin film rather precisely."@en . "Mechanical properties of Al thin film measured by microcompression"@en . . "Mechanical properties of Al thin film measured by microcompression"@en . . "211232" . . "RIV/00216305:26210/11:PU95284" . . "4"^^ . "26210" . . "Neuveden" . . "Neuveden" . "2"^^ . "focused ion beam, pillars, Al thin film, nanoindenter"@en . "1"^^ . . "Kruml, Tom\u00E1\u0161" . . . "Kub\u011Bna, Ivo" .