"Software for PSI and VSI interference measurements"@en . . "Software pro interferometrick\u00E9 m\u011B\u0159en\u00ED metodami PSI a VSI"@cs . . "Software for PSI and VSI interference measurements"@en . . "RIV/00216305:26210/10:PR25221" . "Software pro interferometrick\u00E9 m\u011B\u0159en\u00ED metodami PSI a VSI" . "Program slou\u017E\u00ED pro m\u011B\u0159en\u00ED topografie povrchu interferometri\u00ED v b\u00EDl\u00E9m sv\u011Btle (VSI - Vertical scanning interferometry) a interferometri\u00ED s \u0159\u00EDzenou zm\u011Bnou f\u00E1ze (PSI - Phase shifting interferometry) . V p\u0159\u00EDpad\u011B metody VSI se povrch vzorku skenuje ve svisl\u00E9m sm\u011Bru s krokem 70-140 nm. V\u00FDsledkem je sada interferogram\u016F v po\u010Dtu 64 a\u017E 512, kter\u00E9 se n\u00E1sledn\u011B analyzuj\u00ED a vyhodnot\u00ED se topografie povrchu. U metody PSI je sejmuto p\u011Bt a\u017E deset interferogram\u016F, mezi kter\u00FDmi je jedno z ramen interferometru posouv\u00E1no o zn\u00E1m\u00FD f\u00E1zov\u00FD posuv. Jednotliv\u00E9 sn\u00EDmky lze pr\u016Fm\u011Brovat z 2-250 sn\u00EDmk\u016F pro potla\u010Den\u00ED vlivu vibrac\u00ED, fluktuace intenzity zdroje a \u0161umu." . "Software pro interferometrick\u00E9 m\u011B\u0159en\u00ED metodami PSI a VSI"@cs . . "Program slou\u017E\u00ED pro m\u011B\u0159en\u00ED topografie povrchu interferometri\u00ED v b\u00EDl\u00E9m sv\u011Btle (VSI - Vertical scanning interferometry) a interferometri\u00ED s \u0159\u00EDzenou zm\u011Bnou f\u00E1ze (PSI - Phase shifting interferometry) . V p\u0159\u00EDpad\u011B metody VSI se povrch vzorku skenuje ve svisl\u00E9m sm\u011Bru s krokem 70-140 nm. V\u00FDsledkem je sada interferogram\u016F v po\u010Dtu 64 a\u017E 512, kter\u00E9 se n\u00E1sledn\u011B analyzuj\u00ED a vyhodnot\u00ED se topografie povrchu. U metody PSI je sejmuto p\u011Bt a\u017E deset interferogram\u016F, mezi kter\u00FDmi je jedno z ramen interferometru posouv\u00E1no o zn\u00E1m\u00FD f\u00E1zov\u00FD posuv. Jednotliv\u00E9 sn\u00EDmky lze pr\u016Fm\u011Brovat z 2-250 sn\u00EDmk\u016F pro potla\u010Den\u00ED vlivu vibrac\u00ED, fluktuace intenzity zdroje a \u0161umu."@cs . . . "The application is designated to realize surface topography measurements based on Phase shifting interferometry and Vertical scanning interferometry techniques. In case of VSI technique the sample surface is scanned in vertical direction with 70-140 nm steps to obtain from 64 to 512 interferograms. The surface topography is gained by evaluating the series of interferograms. Unlike in PSI method it is necessary to acquire from five to ten frames simultaneously as one of the arms is shifted by controlled phase step. Individual interferograms can be achieved by averaging from 2 to 250 frames in order to suppress vibration effects, light source fluctuations and noise."@en . . "26210" . . "PFsnapper" . "RIV/00216305:26210/10:PR25221!RIV11-MSM-26210___" . . . . . "\u0160perka, Petr" . "Software pro interferometrick\u00E9 m\u011B\u0159en\u00ED metodami PSI a VSI" . . "P(ME 905)" . . . "http://dl.uk.fme.vutbr.cz/zobraz_soubor.php?id=1330 A2/421" . "288321" . . "1"^^ . "Odpov\u011Bdn\u00E1 osoba pro licen\u010Dn\u00ED jedn\u00E1n\u00ED: Petr \u0160perka, Brno, Technick\u00E1 2, +420 541 143 238, sperka@fme.vutbr.cz \u00DASTAV KONSTRUOV\u00C1N\u00CD, Vysok\u00E9 u\u010Den\u00ED technick\u00E9 v Brn\u011B, Technick\u00E1 2896/2, 616 69 BRNO Windows XP, CPU 1GHz min, 1GB RAM. Kamera: Phot" . "1"^^ . . "[96D2F743A15F]" . "microscopy, white light, monochromatic light"@en . .