"P\u0159\u00EDprava mikrokompresn\u00EDch vzork\u016F z tenk\u00FDch vrstev pomoc\u00ED fokusovan\u00FDch iontov\u00FDch svazk\u016F" . . . "\u017Dilina - S\u00FA\u013Aov" . "In this paper a new method of mechanical properties measurement of thin films is presented. This method combines preparation of specimen using focused ion beam and compressive test by nanoindenter. This paper is focused on descrition of the preparation microcompressive specimens. The thin Al film was studied,. The cylindrical pillars had diameter about 1.3. micrometers and their height was determined by thickness of layer (2 micrometers). The optimized reproducible process of the preparation of the microcompressive specimens was found. This process is optimized from geometry and preparation time poing of view. Successfully executed compressive tests confirmed suitability specimens for microcompresive test."@en . . . "Tento \u010Dl\u00E1nek popisuje novou metodu m\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev, kter\u00E1 kombinuje kompresn\u00ED test pomoc\u00ED nanoindentoru a p\u0159\u00EDpravu vzork\u016F pomoc\u00ED fokusovan\u00FDch iontov\u00FDch svazk\u016F. \u010Cl\u00E1nek je p\u0159edev\u0161\u00EDm zam\u011B\u0159en na popis p\u0159\u00EDpravy mikrokompresn\u00EDch vzork\u016F. Experimetny byly prov\u00E1d\u011Bny na tenk\u00E9 Al vrstv\u011B. P\u0159ipraven\u00E9 v\u00E1lcov\u00E9 pil\u00ED\u0159ky m\u011Bly pr\u016Fm\u011Br cca 1,3 mikrometru a jejich v\u00FD\u0161ka je d\u00E1na tlou\u0161\u0165kou vrstvy (2 mikrometry). Byl nalezen optimalizovan\u00FD postup p\u0159\u00EDpravy mirkokompresn\u00EDch vzork\u016F jak z hlediska po\u017Eadovan\u00E9 geometrie tak z hlediska \u010Dasov\u00E9 n\u00E1ro\u010Dnosti p\u0159\u00EDpravy. Popsan\u00FD postup p\u0159\u00EDpravy vede k reprodukovateln\u00E9mu tvaru pil\u00ED\u0159k\u016F." . "Vystav\u011Bl, Tom\u00E1\u0161" . . . "focused ion beam, microcompresion, thin films"@en . . "RIV/00216305:26210/09:PU86380!RIV11-MSM-26210___" . "2009-01-29+01:00"^^ . "Tento \u010Dl\u00E1nek popisuje novou metodu m\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev, kter\u00E1 kombinuje kompresn\u00ED test pomoc\u00ED nanoindentoru a p\u0159\u00EDpravu vzork\u016F pomoc\u00ED fokusovan\u00FDch iontov\u00FDch svazk\u016F. \u010Cl\u00E1nek je p\u0159edev\u0161\u00EDm zam\u011B\u0159en na popis p\u0159\u00EDpravy mikrokompresn\u00EDch vzork\u016F. Experimetny byly prov\u00E1d\u011Bny na tenk\u00E9 Al vrstv\u011B. P\u0159ipraven\u00E9 v\u00E1lcov\u00E9 pil\u00ED\u0159ky m\u011Bly pr\u016Fm\u011Br cca 1,3 mikrometru a jejich v\u00FD\u0161ka je d\u00E1na tlou\u0161\u0165kou vrstvy (2 mikrometry). Byl nalezen optimalizovan\u00FD postup p\u0159\u00EDpravy mirkokompresn\u00EDch vzork\u016F jak z hlediska po\u017Eadovan\u00E9 geometrie tak z hlediska \u010Dasov\u00E9 n\u00E1ro\u010Dnosti p\u0159\u00EDpravy. Popsan\u00FD postup p\u0159\u00EDpravy vede k reprodukovateln\u00E9mu tvaru pil\u00ED\u0159k\u016F."@cs . "Kub\u011Bna, Ivo" . "P\u0159\u00EDprava mikrokompresn\u00EDch vzork\u016F z tenk\u00FDch vrstev pomoc\u00ED fokusovan\u00FDch iontov\u00FDch svazk\u016F" . "1"^^ . "RIV/00216305:26210/09:PU86380" . "978-80-8070-959-4" . . "3"^^ . "Kruml, Tom\u00E1\u0161" . . "336184" . "Preparation of microcompresion specimens from thin films films using focused ion beam"@en . . . "[2185FDC57611]" . "26210" . "P\u0159\u00EDprava mikrokompresn\u00EDch vzork\u016F z tenk\u00FDch vrstev pomoc\u00ED fokusovan\u00FDch iontov\u00FDch svazk\u016F"@cs . "Sk" . "4"^^ . "P\u0159\u00EDprava mikrokompresn\u00EDch vzork\u016F z tenk\u00FDch vrstev pomoc\u00ED fokusovan\u00FDch iontov\u00FDch svazk\u016F"@cs . "S" . "SEMDOK 2009" . "Neuveden" . . . . . "Preparation of microcompresion specimens from thin films films using focused ion beam"@en .