"P(OC09013)" . "Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported."@en . "RIV/00216305:26210/09:PU83775" . "9"^^ . "Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography" . "Joint Conferences on Advanced Materials, 6th Workshop on Functional and Nanostructured Materials, 10th Conference on Intermolecular and Magnetic Interactions in Matter" . . . . "Gdansk, Poland" . "Sulmona - L\u00B4Aquila" . . "978-83-908112-7-7" . "Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography"@en . . . "2009-09-27+02:00"^^ . "Utilization of prototype low-cost tabletop soft X-ray laser (46.9 nm) as an Interference Nano-Litography tool is reported." . "RIV/00216305:26210/09:PU83775!RIV10-MSM-26210___" . . "1"^^ . "26210" . "[A5E389D86DB8]" . . "Task Publishing" . . . . . . . "Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography"@en . . "Morphology Investigation of Periodic Nano-patterns Produced by Large Area X-ray Interference Litography" . "327487" . "1"^^ . . "nano-litography, soft X-ray laser, Ar+8, 46.9 nm"@en . . "Kaiser, Jozef" .