"1"^^ . "[178FF4958C46]" . . "NANOTECHNOLOGY" . "Kaiser, Jozef" . . "26210" . . . "A prototype low cost table-top Ar capillary discharge laser source (1.5 ns pulse duration, lambda = 46.9 nm) was successfully used to produce, by means of interference lithography (with a simple Lloyd mirror setup), large area (0.1 mm2) regular patterns from 400 nm down to 22.5 nm (half-pitch) on PMMA/Si (PMMA: polymethylmethacrylate) substrates. The experiments allowed a systematical investigation of the degree of mutual coherence of the source, giving a clear indication that the interference lithography can be pushed down to the ultimate resolution limit of lambda/4." . . "9"^^ . "RIV/00216305:26210/09:PU81391!RIV10-MSM-26210___" . "Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence" . . "A prototype low cost table-top Ar capillary discharge laser source (1.5 ns pulse duration, lambda = 46.9 nm) was successfully used to produce, by means of interference lithography (with a simple Lloyd mirror setup), large area (0.1 mm2) regular patterns from 400 nm down to 22.5 nm (half-pitch) on PMMA/Si (PMMA: polymethylmethacrylate) substrates. The experiments allowed a systematical investigation of the degree of mutual coherence of the source, giving a clear indication that the interference lithography can be pushed down to the ultimate resolution limit of lambda/4."@en . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . "Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence"@en . . . "4"^^ . "323207" . . "RIV/00216305:26210/09:PU81391" . . "2" . "Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence"@en . . "20" . "Large area interference lithography using a table-top extreme ultraviolet laser: a systematic study of the degree of mutual coherence" . . "XUV interference litography, capillary-discharge based table-top source"@en . . "0957-4484" . "P(OC09013)" . .