. "Mach, Jind\u0159ich" . . "PL - Polsk\u00E1 republika" . "Analysis of thin films by TOF-LEIS" . "111" . . . "3" . . "Anal\u00FDza tenk\u00FDch vrstev pomoc\u00ED ToF-LEIS"@cs . . "[1CD8347049A5]" . . . "Analysis of thin films by TOF-LEIS"@en . . "RIV/00216305:26210/07:PU67845!RIV07-GA0-26210___" . "Time of Flight, TOF, Low energy, Ion Scattering, LEIS, Surfaces"@en . . "In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness."@en . . "In the paper the design and application of a TOF-LEIS instrument built into an UHV complex deposition and analytical apparatus is described. A special attention is aimed at demonstrating the ability of TOF-LEIS to analyse near-to-surface layers of thin films prepared both ex-situ and in-situ. Additionally, the monitoring of diffusion processes close to a sample surface by this technique is presented. It is shown that the broadening of peaks in TOF-LEIS spectra can be attributed to multiple scattering and inelastic losses of ions in deeper layers. As a result of that, the peak width of ultrathin films depends on their thickness." . "409574" . . "Analysis of thin films by TOF-LEIS" . "P(GP202/05/P288), P(IAA1010413), P(LC06040), Z(MSM0021630508)" . . . "5"^^ . . "RIV/00216305:26210/07:PU67845" . "Kol\u00EDbal, Miroslav" . . "26210" . "Anal\u00FDza tenk\u00FDch vrstev pomoc\u00ED ToF-LEIS"@cs . . "0587-4246" . "Acta Physica Polonica A" . "7"^^ . "Analysis of thin films by TOF-LEIS"@en . . "5"^^ . . "Anal\u00FDza tenk\u00FDch vrstev pomoc\u00ED ToF-LEIS"@cs . . "B\u00E1bor, Petr" . . . . "335-341" . "Pr\u016F\u0161a, Stanislav" . . . "\u0160ikola, Tom\u00E1\u0161" . .