. . . "RIV/00216305:26110/14:PU112356!RIV15-MSM-26110___" . "29793" . . "2"^^ . "Neuveden" . . "2014-11-05+01:00"^^ . "conductive AFM, finite element method, fem"@en . "Modeling C-AFM measurement using FEM" . . "Brno" . . "3"^^ . "6"^^ . "RIV/00216305:26110/14:PU112356" . "Nanocon 2014" . . . "Klapetek, Petr" . . "[3331607D6C34]" . . "Modeling C-AFM measurement using FEM" . "The presented work describes a finite element method based modeling of a conductive AFM measurement process. The C-AFM is a scanning probe microscopy technique for mapping electrical properties of a sample together with its topography. The contact resistance between the probe and the rough surface is modeled in two steps - first the problem of mechanical deformation is solved and then the electrical field, and current, is found. The geometry of the model comes from a real sample topography measured using AFM. The whole multiphysics 3D simulation is done for each data point, which makes the problem possible to be solved only using a supercomputer with many simplifications and optimizations." . . . . "978-80-87294-55-0" . . . "Modeling C-AFM measurement using FEM"@en . "\u0160lesinger, Radek" . "Modeling C-AFM measurement using FEM"@en . "Neuveden" . "26110" . "The presented work describes a finite element method based modeling of a conductive AFM measurement process. The C-AFM is a scanning probe microscopy technique for mapping electrical properties of a sample together with its topography. The contact resistance between the probe and the rough surface is modeled in two steps - first the problem of mechanical deformation is solved and then the electrical field, and current, is found. The geometry of the model comes from a real sample topography measured using AFM. The whole multiphysics 3D simulation is done for each data point, which makes the problem possible to be solved only using a supercomputer with many simplifications and optimizations."@en . "S" . "Martinek, Jan" .