. "Vl\u010Dek, Miroslav" . "1"^^ . "3"^^ . "nano lithography; resists; chalcogenide glass"@en . "Chalcogenide glass resists for lithography"@en . . "Kovalskiy, Andriy" . . "This chapter comprehensively reviews the possible structural and compositional changes of chalcogenide glasses induced by exposure with suitable radiation (VIS, UV, X-ray, e-beam, ions) which result in their highly selective wet or dry etching and make chalcogenide glasses superior resists for high resolution, gray scale lithography. Their photo- and e-beam resist applications are compared with those for widely used polymer resists." . "25310" . . . "RIV/00216275:25310/14:39897425" . . "Chalcogenide glass resists for lithography"@en . "Chalcogenide glass resists for lithography" . . "Chalcogenide Glasses: Preparation, Properties and Applications" . "978-0-85709-345-5" . "This chapter comprehensively reviews the possible structural and compositional changes of chalcogenide glasses induced by exposure with suitable radiation (VIS, UV, X-ray, e-beam, ions) which result in their highly selective wet or dry etching and make chalcogenide glasses superior resists for high resolution, gray scale lithography. Their photo- and e-beam resist applications are compared with those for widely used polymer resists."@en . "Jain, Himanshu" . "34"^^ . "RIV/00216275:25310/14:39897425!RIV15-MSM-25310___" . . "Chalcogenide glass resists for lithography" . . . "Woodhead Publishing" . "Cambridge" . . "I, P(GAP204/11/0832)" . . . "716"^^ . . . "6754" . "[E2443880A632]" . .