. "5"^^ . "RIV/00216275:25310/04:00001378" . "25310" . "0022-3093" . . "Byly sp\u0159ipraveny a charakterizov\u00E1ny amorfn\u00ED tenk\u00E9 filmy As40S60 a As40Se60 p\u0159ipraven\u00FDch metodou plasma-enhanced CVD"@cs . "Z(MSM 253100001)" . "Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition"@en . "Strukturn\u00ED a optick\u00E1 charakterizace amorfn\u00EDch tenk\u00FDch film\u016F As40S60 a As40Se60 p\u0159ipraven\u00FDch metodou CVD"@cs . "M\u00E1rquer, E." . . "345&34" . . . . "Vl\u010Dek, Miroslav" . "RIV/00216275:25310/04:00001378!RIV/2005/MSM/253105/N" . "Strukturn\u00ED a optick\u00E1 charakterizace amorfn\u00EDch tenk\u00FDch film\u016F As40S60 a As40Se60 p\u0159ipraven\u00FDch metodou CVD"@cs . "1"^^ . "Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition" . "Journal of Non-Crystalline Solids" . "Prieto-Alc\u00F3n, R." . "[507992BD3C77]" . . . . "Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition" . "Neuveden" . "Gonz\u00E1lez-Leal, J. M." . "4"^^ . "Amorphous chalcogenide films of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin films, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-profiling stylus instrument, and differences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD films, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper."@en . . "NL - Nizozemsko" . "amorphous chalcogenide films;PECVD;"@en . "88-92" . "588446" . "Amorphous chalcogenide films of chemical compositions As40S60 and As40Se60 have been prepared by plasma-enhanced chemical vapor deposition.An improved optical characterization method suitable for non-uniform thin films, which also takes into consideration the weak absorption in the substrate, has successfully been applied.The values of the average thickness and thickness variation, d and Dd, respectively, were crossed-checked with those measured by use of a surface-profiling stylus instrument, and differences between the directly measured and the optically calculated values were, in all cases, less than 2%.A comparison between the structural and optical properties of these PECVD films, and those of the same chemical composition prepared by thermal evaporation, is systematically made in this paper." . "Structural and optical characterization of amorphous As40S60 and As40Se60 films prepared by plasma-enhanced chemical vapor deposition"@en . . . . .