. "P(GA202/09/1013), Z(MSM0021622410)" . "We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration." . . "Homogeneous and heterogeneous nucleation of oxygen in Si-CZ"@en . "Homogeneous and heterogeneous nucleation of oxygen in Si-CZ"@en . . "14740" . . . . "We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration."@en . "Caha, Ond\u0159ej" . . . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . "[E47A4210E802]" . . . "4"^^ . . . "4"^^ . . "RIV/00216224:14740/11:00050318" . . "1012-0394" . . . "Medu\u0148a, Mojm\u00EDr" . "Kub\u011Bna, Alan" . . "Solid State Phenomena" . . "6"^^ . "RIV/00216224:14740/11:00050318!RIV12-GA0-14740___" . . "Interstitials; Nucleation; Precipitation; Silicon; Vacancies"@en . "178-179" . . . . "Homogeneous and heterogeneous nucleation of oxygen in Si-CZ" . "Homogeneous and heterogeneous nucleation of oxygen in Si-CZ" . "Kub\u011Bna, Josef" . . "Neuveden" . "202667" .