. "Plasma Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses"@en . "[6738B9E66936]" . "26" . "Thin Solid Films" . . "RIV/00216224:14310/96:00000441" . "3"^^ . . "280" . "0"^^ . . "1996" . "0"^^ . "832142" . "Plasma Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses" . "Plasma Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses"@en . "Plasma Enhanced Chemical Vapour Deposition of Thin Films from Tetraethoxysilane and Methanol: Optical Properties and XPS Analyses" . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . "3"^^ . . "14310" . "Z(MSM 143100003)" . "RIV/00216224:14310/96:00000441!RIV/2002/MSM/143102/N" . . "N/A" . . . . . "11"^^ . "Jan\u010Da, Jan" . . . . "0040-6090" . "PECVD, TEOS"@en . "Zaj\u00ED\u010Dkov\u00E1, Lenka" . "Ohl\u00EDdal, Ivan" . . "N/A"@en . . .