. . "Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films." . "P(GD104/09/H080), Z(MSM0021622411)" . "Ne\u010Das, David" . "Muresan, Mihai George" . . "Effect of Nitrogen Incorporation on Optical Properties of DLC Layers" . . . "Zaj\u00ED\u010Dkov\u00E1, Lenka" . "Effect of Nitrogen Incorporation on Optical Properties of DLC Layers"@en . "14310" . . "RIV/00216224:14310/10:00047539" . "Effect of Nitrogen Incorporation on Optical Properties of DLC Layers" . . "Diamond-Like Carbon; optical properties"@en . . "Effect of Nitrogen Incorporation on Optical Properties of DLC Layers"@en . . "4"^^ . "RIV/00216224:14310/10:00047539!RIV11-GA0-14310___" . "Muresan, Mihai George" . . "256081" . . "Franta, Daniel" . "4"^^ . . . "[74B892552C39]" . . . . "Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge 13.56 in the mixture of CH4/H2/N2 on silicon substrates. Nitrogen content allowed reduction of the inherent internal stress of the DLC layer. DC self-bias, time and gas feed composition parameters were used for modification of the optical properties, adhesion to substrates, chemical composition and structure of the deposited films."@en . . .